“…In this paper, it is revealed that the controlling of surface EM waves can be achieved by simply changing the depth or refractive index of a single deep subwavelength groove in the metal grating, and detailed physical explanation is given. With the increase of the groove depth or refractive index, the surface wave propagation characteristics show obvious periodic changes, which is essentially caused by the mode resonance between the surface modes and the groove cavity modes, similar to the Fano resonance [47][48][49][50] . Moreover, under the mode resonance, the grating surface will form high-intensity local standing waves, which can be applied to deep subwavelength resonators or spasers.…”