2017
DOI: 10.1134/s0020168517100089
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Tantalum chemical vapor deposition on substrates from various materials

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Cited by 10 publications
(5 citation statements)
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“…It is reported that not only would it be possible to thermally decompose APR to rhenium oxides and then reduce it to rhenium powder (Equations 2 and 3), but also rhenium can be produced by oxidation of APR to rhenium heptoxide and its reduction by hydrogen (Equations 4 and 5). There are several methods which have been published based on these theories but there are still some aspects that have to be concerned (Goncharov et al 1999;Leonharot et al 2001;Li et al 2001;Hu et al 2003;Leonhardt et al 2003;Jurewicz and Guo 2005).…”
Section: Introductionmentioning
confidence: 99%
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“…It is reported that not only would it be possible to thermally decompose APR to rhenium oxides and then reduce it to rhenium powder (Equations 2 and 3), but also rhenium can be produced by oxidation of APR to rhenium heptoxide and its reduction by hydrogen (Equations 4 and 5). There are several methods which have been published based on these theories but there are still some aspects that have to be concerned (Goncharov et al 1999;Leonharot et al 2001;Li et al 2001;Hu et al 2003;Leonhardt et al 2003;Jurewicz and Guo 2005).…”
Section: Introductionmentioning
confidence: 99%
“…There are several methods which have been published based on these theories but there are still some aspects that have to be concerned (Goncharov et al. 1999; Leonharot et al. 2001; Li et al.…”
Section: Introductionmentioning
confidence: 99%
“…Part II had a preferred orientation in α -Ta (110) direction, with small peaks also observed at 2 θ = 68 and 73° corresponding to ß -Ta. Such a mixture of phases has been encountered in low-pressure CVD [16,17] depending on deposition conditions.
Figure 3 XRD patterns of Parts I and II of the Ta coating and α -Ta.
…”
Section: Resultsmentioning
confidence: 99%
“…CVD–Ta precursors can be classified as organic (e.g. Ta(NEt 2 ) 3 , Ta(NEt 2 ) 4 [15], and Ta(CO) 5 ) or as halides [16]. The organic cases can leave behind impurities [15].…”
Section: Introductionmentioning
confidence: 99%
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