Hydraulic impedance is a critical parameter for the operation of electrospray emitters, and for preventing flooding when spraying from arrays of emitters. Controlling flow rate by tuning the flow impedance allows accessing different operating modes, such as droplet, ionic, or pulsating. We report on a method to tailor the hydraulic impedance of micromachined capillary out-of-plane emitters with integrated extractor electrodes by filling them with silica microspheres. Spraying the ionic liquid 1-ethyl-3-methylimidazolium tetrafluoroborate ͑EMI-BF 4 ͒, we demonstrate the ability to tune from droplet emission to pure ion emission depending on microbead diameter, obtaining stable emission from single emitters and from arrays of 19 emitters. © 2009 American Institute of Physics. ͓DOI: 10.1063/1.3117191͔ Large arrays of nanoelectrospray emitters capable of operating in pure ionic mode using ionic liquids are of great interest for space micropropulsion and as ion sources for future focused ion beam applications. The feasibility of large arrays of microfabricated silicon out-of-plane arrays of capillaries has been shown previously, 1,2 but their operation has been difficult due to low hydraulic impedance, identified as a key parameter in the stability of electrosprays, [3][4][5] and as a key parameter in determining ion to droplet ratio when spraying ionic liquids. Recent studies with the ionic liquids 1-ethyl-3-methylimidazolium tetrafluoroborate ͑EMI-BF 4 ͒ and 1-ethyl-3-methylimidazolium bis͑trifluorom-ethylsulfonyl͒imide ͑EMI-Tf 2 N, also referred to as EMI-Im͒, show that when sprayed from a capillary under vacuum conditions, a purely ionic regime ͑PIR͒ is only reached at low flow rates ͑Ӷ1 nL/ s͒ while at higher flow rates mixed droplet-ion emission is observed. [6][7][8][9] We have developed a method to tailor the hydraulic impedance in microfabricated silicon capillary emitters by creating a "porous" structure inside the capillary, thus combining the advantages of internally wetted capillaries with flow rate matching of externally wetted emitters. Similar to the method described by Valaskovic and Ehrenfeld 10 for loading capillaries with diameters below 300 m with particulate materials, in our case without applying any pressure, the modification of the hydraulic impedance is achieved by introducing silica microspheres into the capillaries and fixing them by means of a silanization step using silicon tetrachloride ͑SiCl 4 ͒ gas. In addition, microfabricated extractor electrodes have been directly integrated onto the capillary arrays allowing for homogeneous spray conditions across the array. The capillaries have an inner diameter of 24 m and a height of 70 m. Their fabrication has been described in detail in a companion paper.
11Retarding potential measurements with single integrated emitters spraying EMI-Tf 2 N, reported below, show operation in droplet mode without microspheres and ionic mode with them. Time-of-flight ͑TOF͒ spectra with arrays of 19 emitters with 5 m microspheres spraying EMI-BF 4 demonstrate th...