A preliminary techno‐economic analysis combining process simulation and economic analysis has been carried out to assess the feasibility of employing a new CF4 abatement and utilization process without HF effluent, where CaO was employed to convert produced HF into CaF2, a useful chemical. Moreover, the effect of employing multi‐bed series reactors compared with a single‐bed reactor on CaF2 production was analyzed using Aspen HYSYS® based on material and energy balances from process flow diagrams for three systems, a single‐bed reactor (S‐1), a two‐bed series reactor (S‐2), and a three‐bed series reactor (S‐3). From economic analysis to estimate annual operating cost savings for three systems, it was found that multi‐bed series reactors (S‐2 and S‐3) performed better than a single‐bed reactor (S‐1) due to equilibrium shift by Le Chatelier's principle leading to reduced operating temperatures to produce the same amount of CaF2 as S‐1. Consequently, annual cost savings of about 7 to 13% were obtained in S‐2 and S‐3 compared to S‐1 and this can serve as a useful guideline for the efficient system design. © 2017 Society of Chemical Industry and John Wiley & Sons, Ltd.