Technological Features Influence on Magnetic Sensitivity of Ferromagnetic Structures

Abstract

The main urgent problems of the magnetic devices and primary conventers development based on the magnetoresistive structures are the sensitivity improvement and thermal stability. This paper discusses how to use the magnetoresistive structures based on nanoscale films of permalloy Ni (80%) Fe (20%) in the sensory systems. It is shown the variation of the shape and size ratio of magnetoresistive elements influences the characteristics of the magnetization and the dynamic range of the sensors, as well as maximum magnetic field sensitivity. The optimization of magnetoresistive structures topological sizes was carried out and sensor design with the highest sensitivity was chosen. It is shown that sensitivity of sensors can achieve value of 20.7 (mV/V)/(kA/m) by changing bias field. The ability to function in a large temperature range with coefficient of thermal stability - 0.35 %/°С was demonstrated for the obtained magnetoresistive structures.

Magnetic Field MEMS-Sensor: Functional Characteristics Control during the Formation of Magnetosensitive Structures

“…Samples with magnetic and non-magnetic layers of a given shape were formed by using photolithography operations. The array of usual and self-aligned structures with the same topological dimensions was manufactured [7][8][9]: the width of the magnetic strip is 10 µm, the distance between shunt strips is 6 µm, the width of the shunt strips is 6 µm. The transfer functions were obtained and the sensitivity was calculated (Fig.…”

Effects of average grain size on the magnetic properties of permalloy films

“…The ability of the magnetic thin films to change its resistance under the influence of an external magnetic field is applied in the creation of effective magnetic field measurement devices [1,2,3,4,5]. Permalloy films FeNi widely used to create anisotropic magnetoresistive sensors (AMR sensors), which convert magnetic field into an electrical signal due to a change in conductivity with a change of the angle between the current vector and the magnetization vector in the permalloy film.…”