1997
DOI: 10.1016/s0022-3115(96)00742-8
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Temperature and dose dependence of ion-beam-induced amorphization in α-SiC

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Cited by 63 publications
(24 citation statements)
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“…This is a significantly lower implanted helium concentration for visible bubble formation in SiC compared to other studies that have reported threshold He concentrations of 2.5-8 at.% He [44,[78][79][80]. The lack of amorphization prior to bubble formation in the study by Chen et al [45,70] might be attributable to a slightly higher irradiation temperature, since the amorphization dose for SiC is very sensitive to temperature near 300-350 K [25,83,84].…”
Section: Threshold He Concentrations For Visible Cavity Formationmentioning
confidence: 52%
“…This is a significantly lower implanted helium concentration for visible bubble formation in SiC compared to other studies that have reported threshold He concentrations of 2.5-8 at.% He [44,[78][79][80]. The lack of amorphization prior to bubble formation in the study by Chen et al [45,70] might be attributable to a slightly higher irradiation temperature, since the amorphization dose for SiC is very sensitive to temperature near 300-350 K [25,83,84].…”
Section: Threshold He Concentrations For Visible Cavity Formationmentioning
confidence: 52%
“…The tensile strength as Young's modulus (E) for 3C SiC is illustrated in Table 4 for ZnS (B3) phase along with a comparison with the reported data [10,15,50,55,56,60,62,64,65]. The model calculations presented here lead to E value of about 411 GPa at zero pressure.…”
Section: Resultsmentioning
confidence: 72%
“…Rutherford backscattering spectrometry in a channeling geometry (RBS/C) has become a standard analytical method in investigations of defects and defect processes in single crystals ; these include studies of impurity sites,1 atomic mismatches in strained epitaxial layer superlattices,2 interfacial di †usions3 and irradiation e †ects in crystals. 4 One of the most useful applications of MeV ion channeling methods has been in the study of ionimplantation damage accumulation and recovery in the near-surface region (\1 lm) of single crystals. Complementary to the local characterization of irradiation damage by transmission electron microscopy (TEM), x-ray di †raction (XRD) and spectroscopic techniques, RBS/C provides a quantitative depth proÐling of atomic disorder present in single-crystal materials.…”
Section: Introductionmentioning
confidence: 99%