Temperature-Compensated Interferometric High-Temperature Pressure Sensor Using a Pure Silica Microstructured Optical Fiber

Reja, Mohammad Istiaque; Nguyen, Linh V.; Lü, Peng; Ebendorff‐Heidepriem, Heike; Warren‐Smith, Stephen C.

doi:10.1109/tim.2022.3157403

Cited by 26 publications

(2 citation statements)

References 63 publications

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“…However, the resistance and capacitance of the signal processing circuit are not significantly affected. If the transmitted signal is not processed, it will affect the control accuracy [ 33 , 34 ]. It is difficult to meet the precision requirements simply by adding hardware compensation to the sensor.…”

Section: Control Methodsmentioning

confidence: 99%

Control Method of Cold and Hot Shock Test of Sensors in Medium

Tian

Zeng

et al. 2023

Sensors

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In order to meet the latest requirements for sensor quality test in the industry, the sample sensor needs to be placed in the medium for the cold and hot shock test. However, the existing environmental test chamber cannot effectively control the temperature of the sample in the medium. This paper designs a control method based on the support vector machine (SVM) classification algorithm and K-means clustering combined with neural network correction. When testing sensors in a medium, the clustering SVM classification algorithm is used to distribute the control voltage corresponding to temperature conditions. At the same time, the neural network is used to constantly correct the temperature to reduce overshoot during the temperature-holding phase. Eventually, overheating or overcooling of the basket space indirectly controls the rapid rise or decrease in the temperature of the sensor in the medium. The test results show that this method can effectively control the temperature of the sensor in the medium to reach the target temperature within 15 min and stabilize when the target temperature is between 145 °C and −40 °C. The steady-state error is less than 0.31 °C in the high-temperature area and less than 0.39 °C in the low-temperature area, which well solves the dilemma of the current cold and hot shock test.

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Section: Control Methodsmentioning

confidence: 99%

Control Method of Cold and Hot Shock Test of Sensors in Medium

Tian

Zeng

et al. 2023

Sensors

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“…The optical fiber pressure sensor is small in size, has anti-electromagnetic interference and high-temperature resistance [ 15 , 16 ] to overcome the above problems. For example, Fei Feng reported an optical fiber Fabry–Perot pressure sensor [ 17 ] as having a maximum linearity error of 1% in the temperature range of 20–400 °C; Mohammad Istiaque Reja developed a pure silica micro-structured optical fiber pressure sensor which can tolerate temperatures up to 800 °C [ 18 ]. However, the fiber Fabry–Perot cavity used for pressure sensing is sensitive to temperature changes, which causes unwanted output besides pressure change.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond Laser Processing Assisted SiC High-Temperature Pressure Sensor Fabrication and Performance Test

Zhao

Wang

et al. 2023

Micromachines

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Due to material plastic deformation and current leakage at high temperatures, SOI (silicon-on-insulator) and SOS (silicon-on-sapphire) pressure sensors have difficulty working over 500 °C. Silicon carbide (SiC) is a promising sensor material to solve this problem because of its stable mechanical and electrical properties at high temperatures. However, SiC is difficult to process which hinders its application as a high-temperature pressure sensor. This study proposes a piezoresistive SiC pressure sensor fabrication method to overcome the difficulties in SiC processing, especially deep etching. The sensor was processed by a combination of ICP (inductive coupled plasma) dry etching, high-temperature rapid annealing and femtosecond laser deep etching. Static and dynamic calibration tests show that the accuracy error of the fabricated sensor can reach 0.33%FS, and the dynamic signal response time is 1.2 μs. High and low temperature test results show that the developed sensor is able to work at temperatures from −50 °C to 600 °C, which demonstrates the feasibility of the proposed sensor fabrication method.

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