2002
DOI: 10.1016/s0304-8853(02)00471-7
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Temperature dependence of structural and optical properties of GeSbTe alloy thin films

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Cited by 13 publications
(11 citation statements)
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“…On the basis of the XRD, TEM, and Raman analyses, we simulated the crystallization process of the amorphous region ͑25 nm thick͒ considering a planar a-c interface with an average growth rate of about 4 ϫ 10 −3 nm/ s and using the optical constant of the amorphous and crystalline GST phases extracted from Ref. 25. The growth rate used for the simulation has been compared to the value reported in a previous work by Kalb et al 26 He obtained his data by atomic force microscopy measurements on 30 nm of amorphous GST films deposited on Si by sputtering and annealed ex situ in the range of 120-150°C.…”
Section: Resultsmentioning
confidence: 99%
“…On the basis of the XRD, TEM, and Raman analyses, we simulated the crystallization process of the amorphous region ͑25 nm thick͒ considering a planar a-c interface with an average growth rate of about 4 ϫ 10 −3 nm/ s and using the optical constant of the amorphous and crystalline GST phases extracted from Ref. 25. The growth rate used for the simulation has been compared to the value reported in a previous work by Kalb et al 26 He obtained his data by atomic force microscopy measurements on 30 nm of amorphous GST films deposited on Si by sputtering and annealed ex situ in the range of 120-150°C.…”
Section: Resultsmentioning
confidence: 99%
“…Each of the atomic configurations of GST have different physical (optical, electrical, and mechanical) properties. [4] The crystalline phase is more reflective and up to three orders of magnitude more electrically conductive than the amorphous phase. [1] These differences in the physical properties between phases, in addition to the ability to retain either phase state for a long time at ambient temperatures, [5] have been utilized in technologies such as rewritable optical data storage (DVD-RW, Blu-ray RW) and nonvolatile electronic phase-change memories…”
Section: Doi: 101002/aelm201700079mentioning
confidence: 99%
“…Thermal boundary resistance between the GST layer and ZnS:SiO 2 capping/underlayer is not included in the model to reduce the mathematical complexity, but its influence is implicitly present through the large thicknesses of the capping and underlayers in the model. Absorption of the optical energy in the Si substrate and possible crystallization of the dielectric ZnS:SiO 2 layers 18 are not modelled in this work to reduce the mathematical complexity of the problem and is beyond the remit of this work. However, the effect of energy absorption in the Si substrate is expected to be small due to the relatively large thickness of the dielectric underlayer.…”
Section: Heat Flow and Crystallization Modelsmentioning
confidence: 99%