2009
DOI: 10.2320/matertrans.m2009164
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Temperature Dependence of the Solubility of Nitrogen in Liquid Silicon Equilibrated with Silicon Nitride

Abstract: The solubility of nitrogen in liquid silicon equilibrated with silicon nitride and its dependence on the composition of the atmosphere has been studied in the temperature region 1428-1542 C. High purity silicon was melted in silicon nitride crucibles under Ar and N 2 atmospheres. The equilibrium was observed to be established within minutes, after which no evolution of the nitrogen content with time could be observed. The nitrogen transfer between the Si 3 N 4 -crucible and the melt was faster than the transfe… Show more

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Cited by 11 publications
(15 citation statements)
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“…As was already reported elsewhere [5,6], the carbon and nitrogen solubilities in the pure Si-C and Si-N systems were found to follow:…”
Section: Resultsmentioning
confidence: 56%
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“…As was already reported elsewhere [5,6], the carbon and nitrogen solubilities in the pure Si-C and Si-N systems were found to follow:…”
Section: Resultsmentioning
confidence: 56%
“…This process would continue until the solute content of the melt was uniform and equal to the saturation limits. As already discussed elsewhere [5,6], the saturation limit is reached quickly in this set-up -within a few minutes at most -and the gasphase transport of nitrogen as N 2 needs not be considered as it has been shown to be insignificant [6].…”
Section: Methodsmentioning
confidence: 95%
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“…The present authors have previously published on the solubility of nitrogen in liquid silicon equilibrated with silicon nitride [1]. In that work, the following Arrhenius expression describing the nitrogen solubility in liquid silicon as a function of temperature was determined:…”
Section: Introductionmentioning
confidence: 99%
“…Arrhenius expressions for the nitrogen content of the extracted samples as functions of temperature, together with the solubility limit found in the pure Si -N-system previously published in[1].…”
mentioning
confidence: 99%