Introduction.The exciplex lasers are now the most powerful among plasma lasers from visible to VIJV range [1-41. The lasers on the exciplex molecules KrF (249 nm), ArF(193 run), XeC1(3O8 nm), XeF (351, 353nm) are most advanced. The operating transition of this lasers is B-+X. The lower (ground) operating term X is the repulsive or weak-coupled one. The highest efficiency (10%) have KrF-laser and, may be [71, ArF-laser. The XeFlaser efficiency is not so high (3%), but this laser is of interest because it has the lowest threshold of pumping among exciplexiasers. Therefore, the opportunity ofnuclear pumping of XeF-laser is under discussion [5].The X term have in XeF molecule a rather deep well. This peculiarity leads to more strong gas temperature dependence and to not high efficiency. It must be mentioned that in the models of the XeF-laser developed up today, the temperature dependence of plasma-chemical reaction rates and its influence on laser output is not considered in details. Besides, the only effective operating transition, not the lasing on two separate transitions (2 =351 and 353 urn) was considered in the most papers.