Temperature-insensitive arrayed waveguide gratings on InP substrates

Tanobe, Hiromasa; Kondo, Y.; Kadota, Y.; Okamoto, Kazuya; Yoshikuni, Y.

doi:10.1109/ofc.1997.719908

Cited by 18 publications

(19 citation statements)

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“…Several ways to athermalize waveguide devices, so that they can be used without active temperature control, have previously been shown [1,2,3]. Here, we will show that using slot-waveguides and taking advantage of the opposite polarity of the Thermo-Optic Coefficients (TOCs) of the core and the liquid top cladding, an athermal waveguide can be designed without sacrificing the high refractive index sensitivity achievable with slot waveguides [4].…”

Section: Introductionmentioning

confidence: 81%

Reducing the temperature sensitivity of SOI waveguide-based biosensors

2012

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Label-free photonic biosensors fabricated on silicon-on-insulator (SOI) can provide compact size, high evanescent field strength at the silicon waveguide surface, and volume fabrication potential. However, due to the large thermo optic coefficient of water-based biosamples, the sensors are temperature-sensitive. Consequently, active temperature control is usually used. However, for low cost applications, active temperature control is often not feasible.Here, we use the opposite polarity of the thermo-optic coefficients of silicon and water to demonstrate a photonic slot waveguide with a distribution of power between sample and silicon that aims to give athermal operation in water.Based on simulations, we made three waveguide designs close to the athermal point, and asymmetric integrated MachZehnder interferometers for their characterization. The devices were fabricated on SOI with a 220 nm device layer and 2 µm buried oxide, by electron beam lithography of hydrogen silsesquioxane (HSQ) resist, and etching in a Cl 2 /HBr/O 2 /He plasma. With Cargile 50350 fused silica matching oil as top cladding, the group index of the three guides varies from 1.9 to 2.8 at 1550 nm. The temperature sensitivity of the devices varied from -70 to -160 pm/K under the same conditions. A temperature sensitivity of -2 pm/K is projected with water as top cladding.

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Section: Introductionmentioning

confidence: 81%

Reducing the temperature sensitivity of SOI waveguide-based biosensors

2012

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“…On the other hand, however, a temperature controller has to be employed to stabilize the chip temperature usually. In order to achieve athermal WDM filters (including AWGs and MRRs), a straightforward approach is introducing another material (like polymer) with negative TOC to compensate the positive TO effect of silicon, which is similar to those used in conventional optical waveguides [76][77][78][79][80]. One can fill the polymer material into the grooves in the silicon waveguide core region [81][82][83], which however requires very precise control for the waveguide fabrication.…”

Section: General Issues For Wdm Filters Based On Soi Nanowires 231 mentioning

confidence: 99%

Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects

2014

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An effective solution to enhance the capacity of an optical-interconnect link is utilizing advanced multiplexing technologies, like wavelength-division-multiplexing (WDM), polarization-division multiplexing (PDM), spatial-division multiplexing (SDM), bi-directional multiplexing, etc. On-chip (de)multiplexers are necessary as key components for realizing these multiplexing systems and they are desired to have small footprints due to the limited physical space for on-chip optical interconnects. As silicon photonics has provided a very attractive platform to build ultrasmall photonic integrated devices with CMOS-compatible processes, in this paper we focus on the discussion of silicon-based (de)multiplexers, including WDM filters, PDM devices, and SDM devices. The demand of devices to realize a hybrid multiplexing technology (combining WDM, PDM and SDM) as well as a bidirectional multiplexing technologies are also discussed to achieve Peta-bit optical interconnects.

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“…As InP-based AWGs usually operate in an actively controlled temperature-stabilised environment the need for temperature insensitivity is less urgent. NTT has reported a temperature insensitive AWG using a temperature compensation triangle [107].…”

Section: Inp-based Awgsmentioning

confidence: 99%

Arrayed‐Waveguide Gratings

Chen

2005

Foundations for Guided‐Wave Optics

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Temperature-insensitive arrayed waveguide gratings on InP substrates

Cited by 18 publications

References 0 publications

Reducing the temperature sensitivity of SOI waveguide-based biosensors

Reducing the temperature sensitivity of SOI waveguide-based biosensors

Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects

Arrayed‐Waveguide Gratings

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