Temperature insensitive optical MEMS pressure sensor using long period gratings on a circular diaphragm

Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method

“…Wenhua Wang et al [21] reduced the influence of thermal expansion coefficient, epoxy resin decomposition, and working point drift by improving the welding process and sensor structure, thus reducing the temperature sensitivity to 0.011 nm/ • C. Vellaluru neeharika et al [23] placed two waveguide gratings with the same temperature coefficients on the MEMS pressure sensor, eliminating the influence of temperature. Juncheng Xu et al [34] retained part of the air in the F-P cavity during the fabrication of the sensor, which reduced the temperature dependence to 0.0076 psi/ • C. Kumart pattnaik P. et al [35] put two long-period gratings in the sensor, which reduced the temperature insensitivity. Tiegen Liu et al [24] designed an optical fiber F-P pressure sensor for liquid level measurement, which adopts a silicon diaphragm and high borosilicate glass tube to eliminate the influence of residual gas temperature, and the measurement error caused by temperature drift is less than 0.09% F.S./K.…”