Temporal and spatial resolution of scattered and recoiled atoms for surface elemental and structural analysis

Rabalais, J. W.

doi:10.1002/(sici)1096-9918(199904)27:4<171::aid-sia460>3.0.co;2-e

Cited by 4 publications

(1 citation statement)

References 31 publications

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“…Our studies have shown that SARIC provides interpretations of the scattering and recoiling patterns in terms of the ion trajectories responsible for the specific features. A 2-D reliability factor R has been developed for the quantitative comparison of experimental and simulated images (15).…”

Section: Io On N--s Sc Ca At Tt Te Er Ri In Ng G T Te Ec Ch Hn Ni Iq ...mentioning

confidence: 99%

Peer Reviewed: Imaging Spectrometry from Nature’s Own Atomic Lenses

Rabalais¹

2001

Anal. Chem.

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Section: Io On N--s Sc Ca At Tt Te Er Ri In Ng G T Te Ec Ch Hn Ni Iq ...mentioning

confidence: 99%

Peer Reviewed: Imaging Spectrometry from Nature’s Own Atomic Lenses

Rabalais¹

2001

Anal. Chem.

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Surface and Thin-Film Analysis

Bubert¹,

Riviére²,

Arlinghaus³

et al. 2002

Ullmann's Encyclopedia of Industrial Chemistry

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Surface and Thin‐Film Analysis, 3. Ion Detection

Riviére

Fabry²,

Pahlke³

et al. 2011

Ullmann's Encyclopedia of Industrial Chemistry

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The article contains sections titled: 1. Secondary Ion Mass Spectrometry 1.1. Static Secondary Ion Mass Spectrometry (SSIMS) 1.1.1. Principles 1.1.2. Instrumentation 1.1.2.1. Ion Sources 1.1.2.2. Mass Analyzers 1.1.3. Quantification 1.1.4. Spectral Information 1.1.5. Applications 1.1.5.1. Oxide Films 1.1.5.2. Interfaces 1.1.5.3. Polymers 1.1.5.4. Biosensors 1.1.5.5. Surface Reactions 1.1.5.6. Imaging 1.1.5.7. Ultrashallow Depth Profiling 1.2. Dynamic SIMS 1.2.1. Principles 1.2.2. Instrumentation 1.2.2.1. Ion Sources 1.2.2.2. Mass Analyzers 1.2.2.3. Detectors 1.2.3. Spectral Information 1.2.4. Quantification 1.2.5. Mass Spectra 1.2.6. Depth Profiles 1.2.7. Imaging 1.2.8. Applications 1.2.8.1. Implantation Profiles 1.2.8.2. Layer Analysis 1.2.8.3. 3D Bulk Element Distribution 2. Secondary Neutral Mass Spectrometry (SNMS) 2.1. General Principles 2.2. Electron‐Beam and HF‐Plasma SNMS 2.2.1. Principles 2.2.2. Instrumentation 2.2.3. Spectral Information 2.2.4. Quantification 2.2.5. Element Depth Profiling 2.2.6. Applications 2.3. Laser‐SNMS 2.3.1. Principles 2.3.1.1. Nonresonant Laser‐SNMS 2.3.1.2. Resonant Laser‐SNMS 2.3.1.3. Experimental Setup 2.3.1.4. Ionization Schemes 2.3.2. Instrumentation 2.3.3. Spectral Information 2.3.4. Quantification 2.3.5. Applications 2.3.5.1. Nonresonant Laser‐SNMS 2.3.5.2. Resonant Laser‐SNMS 3. Ion‐Scattering Techniques 3.1. Rutherford Backscattering Spectroscopy (RBS) 3.1.1. Principles 3.1.2. Instrumentation 3.1.3. Spectral Information 3.1.4. Quantification 3.1.5. Applications 3.2. Low‐Energy Ion Scattering (LEIS) 3.2.1. Principles 3.2.2. Instrumentation 3.2.3. Information 3.2.4. Quantification 3.2.5. Applications 4. Other Ion‐Detecting Techniques 4.1. Desorption Methods 4.1.1. Electron‐Stimulated Desorption (ESD) and Electron‐Stimulated Desorption Ion Angular Distribution (ESDIAD) 4.1.2. Thermal Desorption Spectroscopy (TDS) 4.2. Glow Discharge Mass Spectroscopy (GDMS) 4.3. Fast Atom Bombardment Mass Spectroscopy (FABMS) 4.4. Atom Probe Microscopy 4.4.1. Atom Probe Field‐Ion Microscopy (APFIM) 4.4.2. Position‐Sensitive Atom Probe (POSAP)

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Temporal and spatial resolution of scattered and recoiled atoms for surface elemental and structural analysis

Cited by 4 publications

References 31 publications

Peer Reviewed: Imaging Spectrometry from Nature’s Own Atomic Lenses

Peer Reviewed: Imaging Spectrometry from Nature’s Own Atomic Lenses

Surface and Thin-Film Analysis

Surface and Thin‐Film Analysis, 3. Ion Detection

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