Tensile, creep and fatigue properties of LIGA nickel structures

Cho, H.S.; Hemker, Kevin J.; Lian, Kun; Goettert, Jost

doi:10.1109/memsys.2002.984297

Cited by 25 publications

(33 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Typical strain-time creep curves are shown below in Figure 13.1. The reduction of creep rate during "primary creep" and the attainment of a relatively constant "steady-state" creep-rate are similar to what is commonly observed during pure metal creep [24][25][26]. The measured creep rates have been normalized by the temperature dependent diffusion rates and are plotted as a function of normalized stress in Figure 13.2.…”

Section: -Liga Nickel Creepsupporting

confidence: 56%

See 1 more Smart Citation

Mechanical Properties of MEMS Materials

Sharpe¹

2001

The MEMS Handbook

View full text Add to dashboard Cite

Section: -Liga Nickel Creepsupporting

confidence: 56%

“…the shape. Tests were conducted in tension with R = 0.1 (minimum stress = 10% of maximum stress) at a frequency of 200 Hz [24][25][26]. Figure 12.1 -Optical micrograph of ASTM standard E466 LIGA Ni fatigue specimens; gage width is 50 µm and specimens are 3.7 mm long.…”

Section: -Liga Ni Fatiguementioning

confidence: 99%

Mechanical Properties of MEMS Materials

Sharpe¹

2001

The MEMS Handbook

View full text Add to dashboard Cite

“…It is suggested that electroplated nickel from sulfamate bath is generally formed with a columnar or refined fibrous grain structure and an out-of-plane crystallographic texture that depends on the plating parameters (composition, current density, pH, bath temperature, and agitation operation) (Weil 1989;Whitehurst 1971). Results also show that the measured mechanical properties are directly related to variations in the current density used to deposit the LIGA samples (Lian et al 2001a, b;Christenson et al 1999;Mishra et al 2004;Hemker and Last 2001;Cho et al 2002). It is general concern that LIGA nickel is deposited far from its equilibrium state, but our understanding of the effect of electroplating parameters on these non-equilibrium microstructures is still rather limited.…”

Section: Introductionmentioning

confidence: 92%

Processing-microstructure-resulting materials properties of LIGA Ni

2006

Self Cite

View full text Add to dashboard Cite

Electroplated nickel is the main material used in LIGA technique for fabricating MicroElectroMechanical System (MEMS) components. This paper presents the recent results regarding LIGA Ni material property enhancement at Center for Advanced Microstructures and Devices at Louisiana State University. The methodology of this study is based on the fundamental materials science paradigm that processing and manufacturing determine the microstructure of materials, which results in specific properties, and governs the performance of the structures that are made from these materials. This paper will focus on results in three aspects of our current research efforts, which are: (1) manipulating the plating parameters to tailor deposited Ni microstructures for different grain size distributions that are in the range of tens nanometer in diameters; (2) analyzing the mechanical properties, such as nanohardness, micro-hardness, and wearing property as the function of LIGA Ni metallurgical microstructures; (3) estimating the corrosion properties of nanocrystalline LIGA Ni.

show abstract

“…Microsyst Technol (2009) In previous study, Cho et al (2002) reported the mechanical properties of LIGA/electro-formed Ni, and the Young's modulus of Ni is 163 ± 14 Gpa. H. Majjad et al (1999) presented a study of the Young's modulus of electroplated nickel used in LIGA technology, and the average value is 195 GPa.…”

Section: Experiments and Analysismentioning

confidence: 99%

Analysis of application patterns of Z-type MEMS microspring

Shi

2009

Microsyst Technol

View full text Add to dashboard Cite

In this paper, we design a Z-type microspring, which consists of several ''Z'' type micromechanical beams within mutual connection. With good mechanical performance and mature LIGA fabrication technology, Ni is chosen as the material of Z-type MEMS microspring. The mechanical properties of electroformed Ni have been tested by the Micro Hardness Tester, and the Young's modulus is 219 GPa. Different from traditional springs, microsprings can be divided into three application patterns in direction x, y, and z to study. Applying the Castigliano second theorem of energy method in macro theory, the formulas used to calculate the spring constant of Z-type microspring in the directions of the three application patterns were derived, and verified by the ANSYS finite element method. Using the Tytron250 micro force test machine, the experiments of the Z-type microspring deformation properties were carried out. The spring constant, rupture force and rupture strength of Z-type microspring in direction y are 3821 N/m, 1.64 N and 1.61 GPa, respectively. The experimental results agree with the theoretical analysis. Based on the analysis above, the change laws of the spring constant of microspring in the three application patterns are summarized.

show abstract

Tensile, creep and fatigue properties of LIGA nickel structures

Cited by 25 publications

References 8 publications

Mechanical Properties of MEMS Materials

Mechanical Properties of MEMS Materials

Processing-microstructure-resulting materials properties of LIGA Ni

Analysis of application patterns of Z-type MEMS microspring

Contact Info

Product

Resources

About