2004
DOI: 10.1364/josab.21.001379
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Terahertz time-domain spectroscopy characterization of the far-infrared absorption and index of refraction of high-resistivity, float-zone silicon

Abstract: The far-infrared absorption and index of refraction of high-resistivity, float-zone, crystalline silicon has been measured by terahertz time-domain spectroscopy. The measured new upper limit for the absorption of this most transparent dielectric material in the far infrared shows unprecedented transparency over the range from 0.5 to 2.5 THz and a well-resolved absorption feature at 3.6 THz. The index of refraction shows remarkably little dispersion, changing by only 0.0001 over the range from 0.5 to 4.5 THz.

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Cited by 403 publications
(196 citation statements)
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“…1c): a straightforward calculation of the Fresnel transmission coefficients shows that the transmittance ratio of p-and s-polarized THz radiation is 2.0 ± 0.1 (Ref. 29). This value is in good agreement with the experimental observation (see Fig.…”
mentioning
confidence: 99%
“…1c): a straightforward calculation of the Fresnel transmission coefficients shows that the transmittance ratio of p-and s-polarized THz radiation is 2.0 ± 0.1 (Ref. 29). This value is in good agreement with the experimental observation (see Fig.…”
mentioning
confidence: 99%
“…In the three-layer calculation, we did not consider absorption in silicon because the three interference layers were sufficiently thin that absorption is negligible. In the substrate calculation, however, we considered the extinction coefficients of silicon [10,11] because the substrate was thick enough that absorption could not be ignored. We note that the measured transmission spectrum of the bulk silicon wafer agreed well with the calculation using the above-mentioned optical constants.…”
Section: Methodsmentioning
confidence: 99%
“…All-silicon filters have superior robustness against cryogenic thermal cycling because it is free from CTE mismatching that plagues conventional heterogeneous thin-film filters. Furthermore, all-silicon filters have high throughput in the THz region owing to low absorption of high-resistivity silicon [10,11]. Silicon is also well-suited for mono-material filters because not only it displays good physical and chemical stability but also micro-fabrication processes have been well established for it.…”
Section: Introductionmentioning
confidence: 99%
“…Developed in the 1980s and 1990s [1,2], THz time-domain spectroscopy (THz TDS) has been established as a general spectroscopic technique to study liquids [3], solids [4], gases [5], biomolecules [6,7], aqueous salt solutions [8], nanoparticles [9], semiconductors [10] and plasmas [11]. The covered frequency bandwidth ranges from 3 cm −1 to 140 cm −1 (0.1 THz to 4 THz).…”
Section: Introductionmentioning
confidence: 99%
“…When minimizing the total variation the sample thickness can be deduced [18]. Other algorithms use multiple echoes of the THz pulse [10] or include the determination of the correct sample thickness in the time-domain [19] and in the frequency-domain [20]. For thin samples, the Fourier transformation of the extracted data into a quasi space enables the determination of the thickness with the smallest oscillations of the extracted optical parameter [21].…”
Section: Introductionmentioning
confidence: 99%