Testing and verification of micro-electro-mechanical systems (MEMS) micromirrors for high-performance scientific applications

Anderson, Natalie K.; Fleming, Brian; Suresh, Akkihebbal K.; Vorobiev, Dmitry; Díaz, Adriana Vera; Schindhelm, Rebecca; Hendrix, Amanda

doi:10.1117/12.2593755

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Cited by 4 publications

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Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators

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Ahmad,

et al. 2024

Microsyst Technol

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Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators

Mohamed,

Ahmad,

et al. 2024

Microsyst Technol

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The Ultraviolet Micromirror Imaging Spectrograph: a multi-object spectrograph for far UV astronomy

Suresh¹,

Fleming²,

Anderson³

et al. 2021

UV/Optical/IR Space Telescopes and Instruments: Innovative Technologies and Concepts X

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Adaptive field-of-view ultraviolet integral-field spectroscopy with the Ultraviolet Micromirror Imaging Spectrograph (UMIS)

Fleming,

Vorobiev,

O'Sullivan

et al. 2024

Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray

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The study of solar system bodies in the ultraviolet is often the study of extended sources, including vapor plumes, atmospheres, cometary tails, and planetary surfaces. These objects are traditionally studied with longslit spectrographs that can sample one dimension of spatial information at a time -providing a cross section of the object in question. The Ultraviolet Micromirror Imaging Spectrograph (UMIS) is a new instrument concept that will bring integral-field spectroscopy to the field for the first time, effectively creating a two-dimensional image of the source at every wavelength in the spectral bandpass simultaneously. UMIS is designed around the concept of an image slicer, where a set of angled mirrors at the telescope focal plane dissect the image into sub-regions which are aligned to avoid overlap of spectra on the detector. Unlike conventional image slicers, however, UMIS employs a reconfigurable micromirror array at the focal plane instead of a fixed mirror slicer array. The UMIS micromirror array, provided by Bright Silicon Technologies, consists of 20 × 20 individual mirrors, each actuatable to any angle up to 15 degrees. This new concept overcomes the limitations of a conventional image slicer by enabling the sampling of various sized regions matched to different targets and spectral resolution requirements within a large field-of-view. This proceedings presents the UMIS optical design, concept and development schedule. UMIS is a collaboration of the Planetary Science Institute, The University of Colorado, Boulder, and BAE Systems (formerly Ball Aerospace).

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Testing and verification of micro-electro-mechanical systems (MEMS) micromirrors for high-performance scientific applications

Cited by 4 publications

References 0 publications

Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators

Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators

The Ultraviolet Micromirror Imaging Spectrograph: a multi-object spectrograph for far UV astronomy

Adaptive field-of-view ultraviolet integral-field spectroscopy with the Ultraviolet Micromirror Imaging Spectrograph (UMIS)

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