Texture determination by energy-dispersive XRD

Player, M.A.; Shi, Zhusheng; Clark, S. M.; Miller, Mike; Tang, Chiu C.

doi:10.1016/s0921-4526(98)00272-5

Cited by 5 publications

(2 citation statements)

References 9 publications

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“…Crystallographic planes oriented parallel to the film surface are measured in the Bragg-Brentano geometry; however, these same crystallographic planes are not measured in the 2D diffraction geometry. 24 This geometry effect was illustrated schematically in Figure 1, where the momentum transfer vector of the diffracting planes ( Q) is not parallel to the normal to the thin film surface (n). Thus, the difference in the orientation of the crystallites contributing to the diffraction signal in the diffraction patterns obtained from the two different techniques can lead to significantly different relative intensities.…”

Section: Diffraction Geometrymentioning

confidence: 99%

In situ x-ray diffraction of solution-derived ferroelectric thin films for quantitative phase and texture evolution measurement

Nittala

Mhin

Jones

et al. 2012

Journal of Applied Physics

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An in situ measurement technique is developed and presented, which utilizes x-rays from a synchrotron source with a two-dimensional detector to measure thin film microstructural and crystallographic evolution during heating. A demonstration experiment is also shown wherein the measured diffraction patterns are used to describe phase and texture evolution during heating and crystallization of solution-derived thin films. The diffraction images are measured sequentially while heating the thin film with an infrared lamp. Data reduction methodologies and representations are also outlined to extract phase and texture information from the diffraction images as a function of time and temperature. These techniques and data reduction methods are demonstrated during crystallization of solution-derived lead zirconate titanate ferroelectric thin films heated at a rate of 30 C/min and using an acquisition time of 8 s. During heating and crystallization, a Pt x Pb type phase was not observed. A pyrochlore phase was observed prior to the formation and growth of the perovskite phase. The final crystallized films are observed to have both 111 and 100 texture components. The in situ measurement methodology developed in this work allows for acquiring diffraction images in times as low as 0.25 s and can be used to investigate changes during crystallization at faster heating rates. Moreover, the experiments are shown to provide unique information during materials processing. V C 2012 American Institute of Physics. [http://dx.

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Section: Diffraction Geometrymentioning

confidence: 99%

In situ x-ray diffraction of solution-derived ferroelectric thin films for quantitative phase and texture evolution measurement

Nittala

Mhin

Jones

et al. 2012

Journal of Applied Physics

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“…This is due to its simplicity and rapid data collection. Also for ex situ investigations, especially texture analysis of thin films, EDXRD was already used [24,25]. An advantage of the EDXRD method is the fixed diffraction angle significantly simplifying the experimental set-up.…”

Section: Introductionmentioning

confidence: 99%

In situenergy-dispersive x-ray diffraction system for time-resolved thin-film growth studies

Ellmer

Mientus²,

Wei

et al. 2003

Meas. Sci. Technol.

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Energy-dispersive x-ray diffraction (EDXRD) with synchrotron light can be used for in situ-structural analysis during polycrystalline thin-film growth, due to its fast data collection and the fixed diffraction angle. An in situ deposition and analysis set-up for the investigation of nucleation and growth of thin films during magnetron sputtering was constructed and installed at the synchrotron radiation source Hamburger Synchrotronstrahlungs Labor (Hamburg). The polychromatic synchrotron beam passes the sputtering chamber through Kapton windows and hits the substrate with the growing film. The diffracted beam, observed under a fixed diffraction angle of between 1 • and 10 • was energy-analysed by a high-purity germanium detector. The measurement time for a single XRD spectrum can be as short as 10 s for a beam line at a bending magnet, which allows a time-resolved monitoring of film growth.The performance of the in situ EDXRD set-up is demonstrated for the growth of zinc oxide and tin-doped indium oxide films prepared by reactive magnetron sputtering from ceramic and metallic targets. From the position and the width of the diffraction lines the internal mechanical strain and the grain size of the growing films can be derived. The prospects for thin-film growth investigations using such an instrument are assessed.

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Residual Stress Analysis by White High Energy X‐rays

Genzel

Pyzalla

2008

Neutrons and Synchrotron Radiation in Engineering Materials Science

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Texture determination by energy-dispersive XRD

Cited by 5 publications

References 9 publications

In situ x-ray diffraction of solution-derived ferroelectric thin films for quantitative phase and texture evolution measurement

In situ x-ray diffraction of solution-derived ferroelectric thin films for quantitative phase and texture evolution measurement

In situenergy-dispersive x-ray diffraction system for time-resolved thin-film growth studies

Residual Stress Analysis by White High Energy X‐rays

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