2022
DOI: 10.1177/14613484221145588
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The analysis for the dynamic pull-in of a micro-electromechanical system

Abstract: The pull-in behavior is an inherent property of the micro-electromechanical oscillator. The bisection method and an iterative method are introduced to find its pull-in voltage, and the main factors affecting the pull-in voltage are elucidated. The simple and efficient operability is demonstrated through theoretical analysis and result comparison.

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Cited by 5 publications
(4 citation statements)
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“…Similar to the results in the previous tables, the data are good for the period [0, 1]. Problem 4.7: We consider the following micro-electromechanical system (MEMS)[52]:y″ + y + θ y − 1 0, θ > 0, (4.46) with the ICs: y 0 ( ) y′ 0 ( ) 0. (4.47)…”
mentioning
confidence: 53%
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“…Similar to the results in the previous tables, the data are good for the period [0, 1]. Problem 4.7: We consider the following micro-electromechanical system (MEMS)[52]:y″ + y + θ y − 1 0, θ > 0, (4.46) with the ICs: y 0 ( ) y′ 0 ( ) 0. (4.47)…”
mentioning
confidence: 53%
“…At small values of θ, the solution of the system is stable and periodic, whereas at large values of θ, it becomes Frontiers in Physics frontiersin.org unstable, called pull-in instability. Figure 1 shows that the system is stable and periodic at θ values less than or equal to the critical value (θ 0.203632188) [52], and it becomes unstable at θ values greater than the critical one.…”
Section: (412)mentioning
confidence: 99%
“…14 Yang studied a mathematical control for the pseudo-pull-in stability of the MEMS system. 15 Consider the MEMS oscillator as follows 16,17…”
Section: Introductionmentioning
confidence: 99%
“…Consider the MEMS oscillator as follows 16,17 where y and ρ are the dimensionless distance and voltage-related parameters, respectively.…”
Section: Introductionmentioning
confidence: 99%