“…Although there many other technologies can be applied to characterizing the surface topography of a sample, such as electron microscopy, scanning tunnelling microscopy, optical microscopy, and others, the above technology requires certain conditions and cannot be applied to in situ XRF analysis. In our previous studies [13,14], surface morphology analysis methods based on confocal 3D MXRF was established that could analyse the sample surface morphology without any preprocessing. However, the scanning efficiency was not ideal.…”