The Correlation between Ion Beam/Material Interactions and 
Practical FIB Specimen Preparation

Prenitzer, B. I.; Urbanik-Shannon, C.A.; Giannuzzi, Lucille A.; Brown, S. R.; Irwin, R. B.; Shofner, T. L.; Stevie, F. A.

doi:10.1017/s1431927603030034

Cited by 100 publications

(76 citation statements)

References 65 publications

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“…For example, Prenitzer et al showed visible changes (using SEM) in the shape of the excavated spots and higher amounts of redeposited material at primary intensities of 500, 1000, and 2000 pico-amperes in Ga + ion milling experiments on silicon. 53 From these observations and from the significance of the primary-ion beam obtained in the models, the possibility that the pico-ampere oscillations of the primary ion current at usual operating conditions of the Cameca 1280HR could induce a detectable IMF seems plausible. This effect could be even more evident in the SIMS analyses carried out using picoampere primary currents, e.g.…”

Section: Chamber Pressurementioning

confidence: 92%

Predicting instrumental mass fractionation (IMF) of stable isotope SIMS analyses by response surface methodology (RSM) [Dataset]

Duocastella¹,

Rossell²,

Alsina³

et al. 2017

UPCommons. Portal Del Coneixement Obert De La UPC

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Instrumental mass fractionation (IMF) of isotopic SIMS analyses (Cameca 1280HR, CRPG Nancy) was predicted by response surface methodology (RSM) for 18 O/ 16O determinations of plagioclase, K-feldspar, and quartz. The three predictive response surface models combined instrumental and compositional inputs. The instrumental parameters were: (i) X and Y stage position, (ii) the values of LT1DefX and LT1DefY electrostatic deflectors, (iii) chamber pressure and, (iv) primary-ion beam intensity. The compositional inputs included: (i) anorthite content (An%) for the plagioclase model and, (ii) orthoclase (Or%) and barium (BaO%) contents for the K-feldspar model. The three models reached high predictive powers.

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Section: Chamber Pressurementioning

confidence: 92%

Predicting instrumental mass fractionation (IMF) of stable isotope SIMS analyses by response surface methodology (RSM) [Dataset]

Duocastella¹,

Rossell²,

Alsina³

et al. 2017

UPCommons. Portal Del Coneixement Obert De La UPC

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“…The reason for this decrease in material removal rate at high aspect ratios can be attributed to material redeposition. [33][34][35] It becomes more and more difficult to remove material from a deep yet narrow (i.e., high aspect ratio) structure because the material has to be expelled a long way to escape the top surface of the substrate, and there is a high probability that the material will be redeposited along the sidewalls within the structure itself. Alternatively, we can also explain the reduced material removal rate observed for high aspect ratio structures kinematically.…”

Section: Dependence Of Materials Removal Rate On Aspect Ratio Of MImentioning

confidence: 99%

“…As can be seen from the figure, the channel walls are V-shaped, which suggests that it is quite difficult to remove material from the bottom of this high aspect ratio channel due to material redeposition. [33][34][35] Consequently, in this case, milling any deeper than about 3 lm in depth does not result in any further increase in the depth of the structure actually milled.…”

Section: Dependence Of Materials Removal Rate On Aspect Ratio Of MImentioning

confidence: 99%

Focused ion beam milling of microchannels in lithium niobate

et al. 2012

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We present experimental and simulation results for focused ion beam (FIB) milling of microchannels in lithium niobate in this paper. We investigate two different cuts of lithium niobate, Y-and Z-cuts, and observe that the experimental material removal rate in the FIB for both Y-cut and Z-cut samples was 0.3 lm 3 /nC, roughly two times greater than the material removal rate previously reported in the literature but in good agreement with the value we obtain from stopping and range of ions in matter (SRIM) simulations. Further, we investigate the FIB milling rate and resultant cross-sectional profile of microchannels at various ion beam currents and find that the milling rate decreases as a function of ion dose and correspondingly, the cross-sectional profiles change from rectangular to V-shaped. This indicates that material redeposition plays an important role at high ion dose or equivalently, high aspect ratio. We find that the experimental material removal rate decreases as a function of aspect ratio of the milled structures, in good agreement with our simulation results at low aspect ratio and in good agreement with the material removal rates previously reported in the literature at high aspect ratios. Our results show that it is indeed easier than previously assumed to fabricate nanochannels with low aspect ratio directly on lithium niobate using the FIB milling technique.

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“…There are also issues with the milling process itself with regard to differential milling rates in different materials and the re-deposition of milled material [9].…”

Section: Fib Milling and Sem Imagingmentioning

confidence: 99%

Visualisation of the three-dimensional structure of energetic polymer composite materials

Carmichael¹,

Williamson²,

Govier³

et al. 2012

AIP Conference Proceedings

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Abstract. A review of imaging techniques which can be used to acquire three dimensional data on polymer composite materials is presented. The techniques chosen utilise a variety of contrast forming mechanisms including x-ray, nuclear magnetic resonance and optical & electron microscopy. Discussion is illustrated with reference to a particular HMX based UK PBX. The achievable contrast and spatial resolutions are considered, with arguments relating to destructive and non-destructive methods of acquiring data. The eventual use of this work will be in computational modelling.

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The Correlation between Ion Beam/Material Interactions and Practical FIB Specimen Preparation

Cited by 100 publications

References 65 publications

Predicting instrumental mass fractionation (IMF) of stable isotope SIMS analyses by response surface methodology (RSM) [Dataset]

Predicting instrumental mass fractionation (IMF) of stable isotope SIMS analyses by response surface methodology (RSM) [Dataset]

Focused ion beam milling of microchannels in lithium niobate

Visualisation of the three-dimensional structure of energetic polymer composite materials

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