The curling probe: A numerical and experimental study. Application to the electron density measurements in an ECR plasma thruster

Boni, Federico; Jarrige, Julien; Désangles, Victor; Minea, Tiberiu

doi:10.1063/5.0040175

Cited by 7 publications

(16 citation statements)

References 31 publications

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“…In a previous work [11], we found that the nature of the standing volume wave inside the CP spiral resonator is between the quarter and the half wavelength resonance. This nature depends upon the geometry parameters of the CP resonator.…”

Section: Introductionmentioning

confidence: 80%

A sheath correction method for electron density measurements with the microwave resonant curling probe

Boni,

Désangles,

Jarrige

2023

Plasma Sources Sci. Technol.

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A correction method accounting for plasma sheath effects that appear when performing an electron density measurement with a microwave resonant probe immersed in plasma is described. The diagnostic is the novel curling probe that has already shown promising capabilities in various plasma sources. The correction method is based on the evaluation of two effects relative to the resonant probe operation and its interface with the plasma. First, the characteristic decay length of the electromagnetic field emitted by the curling probe, which defines the probed volume, has been characterized for the different harmonic resonance modes. Second, a semi-analytical model has been adapted to describe the plasma structure forming near the probe, which quantitively describes the electron density profiles across the sheath structure. The correction method is then developed uniquely from numerical simulations and is independent of other diagnostics. Experimental results inside two plasma sources, an inductively coupled plasma and an ECR plasma thruster, are presented and discussed. The validity of the method is assessed (i) by comparing curling probe corrected densities with Langmuir probe results, (ii) by varying the probe orientation to the expanding plasma flow, and (iii) by using two harmonics of the probe. The method is shown to significantly improve the accuracy of electron density measurements. Possible improvements to the method are also discussed.

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Section: Introductionmentioning

confidence: 80%

A sheath correction method for electron density measurements with the microwave resonant curling probe

Boni,

Désangles,

Jarrige

2023

Plasma Sources Sci. Technol.

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“…The latter also allows the electron temperature T e and the electrostatic potential ϕ to be measured. The resonant probe is a curling probe, called CP700 in [32], consisting of a 35 µmthick spiral copper resonator of 106 mm in length, etched on a 0.5 mm-thick RO4003 sheet. The local electron density is calculated following the plasma permittivity [32].…”

Section: Methodsmentioning

confidence: 99%

“…The resonant probe is a curling probe, called CP700 in [32], consisting of a 35 µmthick spiral copper resonator of 106 mm in length, etched on a 0.5 mm-thick RO4003 sheet. The local electron density is calculated following the plasma permittivity [32]. The LP consists of a tungsten wire of 150 µm in diameter and 5 mm in length.…”

Section: Methodsmentioning

confidence: 99%

“…Comparison of performance figures and reproducibility of probe measurements of the conductive and dielectric thruster configurations at 30 W. Measurements indicated with * are taken at ρ = 26 cm from the backplate; the rest are taken at 16 cm. bars, accounting for measurement uncertainties for the curling, Faraday, and LP, are estimated as detailed in [32,34,35], respectively. The presented error bars do not account for thruster operation variability.…”

Section: Methodsmentioning

confidence: 99%

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Comparison of a hybrid model and experimental measurements for a dielectric-coated coaxial ECR thruster

Sanchez-Villar

Boni

Désangles

et al. 2023

Plasma Sources Sci. Technol.

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Electrostatic probe and thrust balance measurements of a coaxial electron-cyclotron-resonance plasma thruster with magnetic nozzle are compared against numerical simulations of the device that solve self-consistently the plasma transport problem with a hybrid particle-in-cell/fluid approach and the microwave electromagnetic fields using mixed finite elements. A simple phenomenological anomalous transport model similar to those used in Hall thruster modeling is applied. Reasonable average relative errors are reported on the ion current density (8.7%) and plasma density (12.8%) profiles along the plume. Good agreement is found in terms of relative errors on thruster performance parameters as the 90%-current divergence angle (0-3%), utilization efficiency (3-10%), peak ion energy (9-15%), and energy efficiency (2-17%). The comparison suggests that enhanced cross-field diffusion is present in the plasma. Differences in the experimental and numerical behavior of electron temperature point to the areas of the model that could be improved. These include the electron heat flux closure relation, which must correctly account for the axial electron cooling observed.

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“…36) The curling probe was used for the measurements of the plasma thruster. 37) The hairpin resonator has also been used to measure the electron temperature. 38) The spatial distribution of plasma density in a chamber was revealed by the cutoff probe 39,40) and the surface-wave probe.…”

Section: 5mentioning

confidence: 99%

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Kambara

Kawaguchi

Lee

et al. 2022

Jpn. J. Appl. Phys.

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Low-temperature plasma processing technologies is essential for material synthesis, device fabrication, and surface treatment. The development of plasma-related products and services requires an understanding of the multiscale complex behaviors of plasma and the hierarchical integration of plasma generation, energy and mass transports through sheath region, surface reactions, and other processes. The importance of science-based and data-driven approaches to controlling systems is argued. The state-of-the-art of deep learning, machine learning, and artificial intelligence in low-temperature plasma science and technology is reviewed. In this review, the requirements and challenges for plasma parameter prediction and processing recipe discovery are asserted by researchers in the fields of material science and plasma processing. It also outlined a science-based, data-driven approach for development of virtual metrology in plasma processes.

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The curling probe: A numerical and experimental study. Application to the electron density measurements in an ECR plasma thruster

Cited by 7 publications

References 31 publications

A sheath correction method for electron density measurements with the microwave resonant curling probe

A sheath correction method for electron density measurements with the microwave resonant curling probe

Comparison of a hybrid model and experimental measurements for a dielectric-coated coaxial ECR thruster

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

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