TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference 2009
DOI: 10.1109/sensor.2009.5285842
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The double-side electroplating and slender ferromagnetic patterns torque-enhancement design for magnetostatic actuator

Tsung-Lin Tang
1
,
Chia-Pao Hsu
2
,
Wen-Chien Chen
3
et al.
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