2020
DOI: 10.1002/mmce.22368
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The effect of a metal PGS on the Q ‐factor of spiral inductors for RF and mm‐wave applications in a 28‐nm CMOS technology

Abstract: In this paper, the effect of a metal patterned ground shield (PGS) on the performance of monolithic inductors is investigated. To this aim, three spiral inductors integrated in a 28‐nm fully depleted (FD) silicon‐on‐insulator (SOI) CMOS technology are analyzed by means of a 3‐D FEM‐based commercial software. The inductors have been designed at different operating frequencies in the RF and mm‐wave ranges to better explore the effect of the PGS. Extensive analysis revealed that the shield is able to improve the … Show more

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Cited by 11 publications
(3 citation statements)
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“…A patterned ground shield (PGS) performed with the lowest metal layer (M1) could also be included beneath the inductor area, as shown in Figure 3b. However, substrate shielding in this technology is not effective since it increases substrate losses and reduces the self-resonant frequency (SRF) [34].…”
Section: Overview Of 28 Nm Fd-soi Technologymentioning
confidence: 99%
“…A patterned ground shield (PGS) performed with the lowest metal layer (M1) could also be included beneath the inductor area, as shown in Figure 3b. However, substrate shielding in this technology is not effective since it increases substrate losses and reduces the self-resonant frequency (SRF) [34].…”
Section: Overview Of 28 Nm Fd-soi Technologymentioning
confidence: 99%
“…The novel interstacked four-port transformer implementation is shown in Figure 4a. No patterned ground shield (PGS) was implemented to improve the self-resonance frequency (SRF) [33,34]. To better understand the geometry of the transformer, Figure 4b depicts the single coil which the whole structure is composed of.…”
Section: Design Of An Interstacked Four-port Transformermentioning
confidence: 99%
“…These extra losses degrade the Q-factor of planar inductors and of unshielded transmission lines, such as coplanar waveguide (CPW) and coplanar stripline (CPS), and planar inductors. The use of patterned ground shields underneath inductors does help mitigate the substrate eddy current losses, but in higher frequencies the ohmic losses from the shield degrades the Q-factor of the inductors, as indicated in [59].…”
Section: Slow-wave Coplanar Striplines (S-cps)mentioning
confidence: 99%