2012
DOI: 10.1016/j.surfcoat.2012.07.017
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The effect of addition of Al in ZrO2 thin film on its resistance to cracking

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Cited by 34 publications
(26 citation statements)
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“…The similar phenomena of Al-O-N and Zr-Al-O coatings were reported in Refs. [47,48], in which the critical value of H/E was around 0.1. By contrast, for CrSiCN (20), CrSiCN (25) and CrSiCN(30) coatings, the relatively inferior elastic abilities lead to confrontation of radial cracks.…”
Section: Morphologies Of Nanoindentation Impressions By Semmentioning
confidence: 99%
“…The similar phenomena of Al-O-N and Zr-Al-O coatings were reported in Refs. [47,48], in which the critical value of H/E was around 0.1. By contrast, for CrSiCN (20), CrSiCN (25) and CrSiCN(30) coatings, the relatively inferior elastic abilities lead to confrontation of radial cracks.…”
Section: Morphologies Of Nanoindentation Impressions By Semmentioning
confidence: 99%
“…In the indentation test the resistance of film to cracking was evaluated from the Vickers diamond indenter imprint in the film surface at a high load of L = 0.75 N and 1 N [34]. For the bending test the film was deposited on a thin Mo strip (80 × 15 × 0.15 mm 3 ) and the coated strip was bent around cylinders of different radii r c until clear cracks in the film were formed; more details are given in references [36][37][38].…”
Section: Methodsmentioning
confidence: 99%
“…Based on the literature reported in recent years [31][32][33][34][35][36] , diborides which possess a (0 0 1) growth texture have a higher hardness than that of massive films that do not possess such a structure in the hexagonal crystal structure [5,7,37] ; (vi) the possible solid solution hardening effect of nitrogen atoms. When P N2 exceeds 0.006 Pa, the volume fraction of the soft amorphous BN phase at the grain boundary is increased, resulting in the sharp reduction of both hardness and elastic modulus.…”
Section: Mechanical and Tribological Propertiesmentioning
confidence: 99%