2007
DOI: 10.1016/j.mee.2007.04.004
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The effect of annealing temperature on the electrical properties of metal-ferroelectric (PbZr0.53Ti0.47O3)-insulator (ZrO2)-semiconductor (MFIS) thin-film capacitors

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Cited by 7 publications
(3 citation statements)
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“…This kind of shift is widely reported for different kind of ferroelectric materials (Bozgeyik et al 2010;Juan et al 2007). Furthermore, the sharp change in the capacitance at the accumulation and inversion region indicates that the interfaces of the junction are good.…”
Section: Methodssupporting
confidence: 65%
“…This kind of shift is widely reported for different kind of ferroelectric materials (Bozgeyik et al 2010;Juan et al 2007). Furthermore, the sharp change in the capacitance at the accumulation and inversion region indicates that the interfaces of the junction are good.…”
Section: Methodssupporting
confidence: 65%
“…Most previous studies about hydrogen impurities in ferroelectric materials are from experiments [21][22][23]. There are a few computational works based on density functional theory (DFT) calculations, but the system sizes were limited [24][25][26][27].…”
Section: Introductionmentioning
confidence: 99%
“…In this particular study, lead zirconate titanate (PZT) mixed homogenous multicomponent binder is used as powder-polymer composite for CIM of microarray. PZT microarrays have been previously established with numerous applications such as nonvolatile memory devices because for their commendable ferroelectric properties; and as sensors in actuators in microelectromechanical systems (MEMS) due to its piezoelectric properties [8][9][10].…”
Section: Introductionmentioning
confidence: 99%