The Effect of Cu:Ag Atomic Ratio on the Properties of Sputtered Cu–Ag Alloy Thin Films

Hsieh, J.H.; Hung, S.Y.

doi:10.3390/ma9110914

Cited by 28 publications

(15 citation statements)

References 18 publications

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“…The calculated resistivities were 11 and 4.5 [μΩ cm] for the metastable phase and the eutectic point, respectively. The ratio between the resistivities, before and after the annealing, is in good agreement with previous study [ 19 ] where codeposition sputter is used to create metastable Cu–Ag phase for investigation (only thin layers, up to 1 μm can be achieved by sputter deposition technique).…”

Section: Resultssupporting

confidence: 91%

Printed Cu–Ag Phases Using Laser‐Induced Forward Transfer

Gorodesky

Sedghani‐Cohen²,

Fogel³

et al. 2021

Adv Eng Mater

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Laser‐induced forward transfer (LIFT) is an additive manufacturing technique where short laser pulses are focused through a transparent substrate onto a thin, uniform, metal layer jetting micrometer‐scale droplets yielding high‐resolution 3D metal structures. Herein, LIFT printing from multilayered metal donors, and from compositional metal mixtures, is explored and presented. A comprehensive study of this sort has been lacking so far. LIFT printing from Cu–Ag structured donors is thoroughly studied. X‐ray diffraction (XRD) analysis reveals the formation of a metastable Cu–Ag phase reflecting the high cooling rate of the metal droplets. Tuning properties of the printed metal structures is made possible by controlling the pulse width and the donor layers’ properties. Longer pulses (10 ns) jetting from cosputtered donors yield better homogeneity than shorter pulses (1 ns) from donors made of distinct sputtered layers. These homogenic structures also display better resistance to chemical etching. This study opens the door to designing various phases and structures with different electrical and mechanical properties by using LIFT of multimaterials donors.

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Section: Resultssupporting

confidence: 91%

Printed Cu–Ag Phases Using Laser‐Induced Forward Transfer

Gorodesky

Sedghani‐Cohen²,

Fogel³

et al. 2021

Adv Eng Mater

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show abstract

“…However, a detailed investigation of magnetic properties with an increase in nitrogen content has not been performed yet on flexible thin films, as reactive nitrogen sputtering may induce structural and magnetic changes. It is clear that processes, which occur at the surface during sputtering, critically affect the functional properties of as-deposited films [ 29 ]. Therefore, parameters such as grain size, the binding energies of surface atoms, and sputtering power will control the stoichiometry [ 30 , 31 ].…”

Section: Introductionmentioning

confidence: 99%

Effect of Target Composition and Sputtering Deposition Parameters on the Functional Properties of Nitrogenized Ag-Permalloy Flexible Thin Films Deposited on Polymer Substrates

2018

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We report the first results of functional properties of nitrogenized silver-permalloy thin films deposited on polyethylene terephthalic ester {PETE (C10H8O4)n} flexible substrates by magnetron sputtering. These new soft magnetic thin films have magnetization that is comparable to pure Ni81Fe19 permalloy films. Two target compositions (Ni76Fe19Ag5 and Ni72Fe18Ag10) were used to study the effect of compositional variation and sputtering parameters, including nitrogen flow rate on the phase evolution and surface properties. Aggregate flow rate and total pressure of Ar+N2 mixture was 60 sccm and 0.55 Pa, respectively. The distance between target and the substrate was kept at 100 mm, while using sputtering power from 100–130 W. Average film deposition rate was confirmed at around 2.05 nm/min for argon atmosphere and was reduced to 1.8 nm/min in reactive nitrogen atmosphere. X-ray diffraction, X-ray photoelectron spectroscopy, scanning electron microscopy, vibrating sample magnetometer, and contact angle measurements were used to characterize the functional properties. Nano sized character of films was confirmed by XRD and SEM. It is found that the grain size was reduced by the formation of nitride phase, which in turns enhanced the magnetization and lowers the coercivity. Magnetic field coupling efficiency limit was determined from 1.6–2 GHz frequency limit. The results of comparable magnetic performance, lowest magnetic loss, and highest surface free energy, confirming that 15 sccm nitrogen flow rate at 115 W is optimal for producing Ag-doped permalloy flexible thin films having excellent magnetic field coupling efficiency.

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“…The obvious diffraction peak in the (111) plane indicates that the film has a crystal structure. Hsieh [26] also reported that as-deposited Ag 50 Cu 50 film only has one diffraction peak. Compared with the reference, the similar XRD result could be obtained.…”

Section: Resultsmentioning

confidence: 94%

Effects of Accumulated Energy on Nanoparticle Formation in Pulsed-Laser Dewetting of AgCu Thin Films

et al. 2021

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Ag50Cu50 films were deposited on glass substrates by a sputtering system. Effects of accumulated energy on nanoparticle formation in pulse-laser dewetting of AgCu films were investigated. The results showed that the properties of the dewetted films were found to be dependent on the magnitude of the energy accumulated in the film. For a low energy accumulation, the two distinct nanoparticles had rice-shaped/Ag60Cu40 and hemispherical/Ag80Cu20. Moreover, the absorption spectra contained two peaks at 700 nm and 500 nm, respectively. By contrast, for a high energy accumulation, the nanoparticles had a consistent composition of Ag60Cu40, a mean diameter of 100 nm and a peak absorption wavelength of 550 nm. Overall, the results suggest that a higher Ag content of the induced nanoparticles causes a blue shift of the absorption spectrum, while a smaller particle size induces a red shift.

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The Effect of Cu:Ag Atomic Ratio on the Properties of Sputtered Cu–Ag Alloy Thin Films

Cited by 28 publications

References 18 publications

Printed Cu–Ag Phases Using Laser‐Induced Forward Transfer

Printed Cu–Ag Phases Using Laser‐Induced Forward Transfer

Effect of Target Composition and Sputtering Deposition Parameters on the Functional Properties of Nitrogenized Ag-Permalloy Flexible Thin Films Deposited on Polymer Substrates

Effects of Accumulated Energy on Nanoparticle Formation in Pulsed-Laser Dewetting of AgCu Thin Films

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