The Effect of Dielectric Charging on Capacitive MEMS Switch

Abstract

Based on a one-dimensional model of dielectric charging for capacitive RF MEMS switches, the accumulated charge density and actuation voltage shift were simulated. The results illustrate that rougher surface can reduce dielectric charging, so the dielectric layer should be fabricated much rougher during deposition process. But the capacitance ratio of switch will be decreased with rougher surface, which can cause a reduction of switch performance. Thus the dielectric surface roughness should be balanced in reliability and isolation.

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

“…Research perspectives on addressing the impact of hot switching in MEMS switches involve investigating advanced materials with improved thermal and mechanical properties [89]. Exploration of novel materials, such as nanocomposites or materials with self-healing properties, aims to enhance the durability of switches under hot switching conditions [90].…”