2022
DOI: 10.3390/plasma5010003
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The Effect of Excited Species on the Collisional Energy of Argon Inductively Coupled Plasmas: A Global Model Study

Abstract: Global modeling of inductively coupled plasma (ICP) reactors is a powerful tool to investigate plasma parameters. In this article, the argon ICP global model is revisited to explore the effect of excited species on collisional energy through the study of different approaches to particle and energy balance equations. The collisional energy loss is much more sensitive to modifications in the balance equations than the electron temperature. According to the simulations, the multistep ionization reduces the collis… Show more

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Cited by 5 publications
(3 citation statements)
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“…coli, the organic material is oxidized because of its photocatalytic activity, and as a result, the organic material of the cell wall membrane increases the number of holes in the TiO 2 valence band . The bactericidal activity and aggregation of TiO 2 are positively linked to the rate of cell death. , …”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…coli, the organic material is oxidized because of its photocatalytic activity, and as a result, the organic material of the cell wall membrane increases the number of holes in the TiO 2 valence band . The bactericidal activity and aggregation of TiO 2 are positively linked to the rate of cell death. , …”
Section: Resultsmentioning
confidence: 99%
“… 100 The bactericidal activity and aggregation of TiO 2 are positively linked to the rate of cell death. 101 , 102 …”
Section: Resultsmentioning
confidence: 99%
“…Altering plasma discharge properties via noble gas addition is a well-known concept in surface etching and plasma processing applications. Argon plasma is populated with a high concentration of active species, such as metastable Ar, which has a high capability for storing excess energy. Due to their long lifetimes, these metastable states may activate other gaseous species via Penning excitation and ionization processes. Noble gas addition can also stabilize the plasma discharge and offer better control over plasma properties. , These concepts have been applied to different types of discharges for plasma-assisted ammonia synthesis. Nakajima and Sekiguchi reported increased NH 3 formation rate upon argon addition in a microwave discharge .…”
Section: Introductionmentioning
confidence: 99%