Abstract. Investigated in this work were changes in the concentration of charge carriers n e and their mobilities , which occur under the influence of thermoannealing of Si n and Ge n crystals grown by the Czochralski method. Thermoannealing of Si n samples was carried out both at 450°C and 650°C. The results of the influence of twostage (combined) thermoannealing have been presented. In the first series of experiments, the annealing was performed at 450°C with varied duration (from 5 to 45 h) at the beginning, and then it was carried out for 40 hours at 650°C. The second series of experiments was as follows: the annealing at 450°C for 45-hour duration, then the annealing at 650°C, which was carried out for various periods of time (5, 10, 20, 45, 66 hours). The observations for changes of n e and were carried out both at the temperature 300 and 77 K. It is ascertained that changing the main parameters (n e and ) in As Ge n heavily doped single crystals, as a result of the series of thermoannealings (duration 30 min in each case) within the temperature range from 540 to 900°C, is non-monotonous due to transformation of the thermodonors I TD into II TD .