“…Silicon nitride (Si 3 N 4 ) is a widely applied semiconductor in electronic devices, integrated photonic devices, and micrometer/nanometer-scale electromechanical systems. − As a traditional covalent ceramic, it possesses many intriguing properties, such as high strength, high hardness, high modulus, and high dielectric coefficient. , In the nanoscale form, Si 3 N 4 as a reinforced whisker can be used for the fabrication of the composite materials. , To further modify its mechanical properties, ion beam irradiation-induced composite structure represents one of the main strategies for material design and fabrication. − Till now, many experimental studies of the mechanical properties of Si 3 N 4 NWs have been reported. − Theoretically, failure mechanisms of Si 3 N 4 NW and mechanical properties of the core–shell materials have also investigated. − However, due to the technical difficulties in deformation test by in situ electron microscopy, the tensile behavior of Si 3 N 4 NWs has not yet been evaluated, which hinders further elucidation of the deformation mechanisms of the nanoscale building blocks.…”