2012
DOI: 10.1088/1757-899x/34/1/012009
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The effect of Substrate temperature on physical and electrical properties of DC magnetron sputtered (Ta2O5)0.85(TiO2)0.15films

Abstract: Influence of substrate bias voltage on the physical, electrical and dielectric properties of RF magnetron sputtered TiO 2 films P Kondaiah, M Chandra Sekhar, S V Jagadeesh Chandra et al.

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Cited by 4 publications
(2 citation statements)
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“…51,52 All diffraction peaks of the Nano Au/Ta 2 O 5 sample annealed at 650 C or higher temperature can be assigned exactly to the standard data of Ta 2 O 5 (JCPDS 25-0922). 53 Usually, a higher annealing temperature can signicantly improve the lattice integrity and crystallinity of the Nano Au/Ta 2 O 5 nanoarchitectures, which will optimize their photocatalytic activities for H 2 evolution accordingly. 50 The crystallite size of the samples can be estimated from the Scherrer equation, D ¼ 0.941l/b cos q, where D is the average grain size, l is the X-ray wavelength (0.15405 nm), and q and b are the diffraction angle and full-width at half-maximum of an observed peak, respectively.…”
Section: Crystallization Behavior and Morphologymentioning
confidence: 99%
“…51,52 All diffraction peaks of the Nano Au/Ta 2 O 5 sample annealed at 650 C or higher temperature can be assigned exactly to the standard data of Ta 2 O 5 (JCPDS 25-0922). 53 Usually, a higher annealing temperature can signicantly improve the lattice integrity and crystallinity of the Nano Au/Ta 2 O 5 nanoarchitectures, which will optimize their photocatalytic activities for H 2 evolution accordingly. 50 The crystallite size of the samples can be estimated from the Scherrer equation, D ¼ 0.941l/b cos q, where D is the average grain size, l is the X-ray wavelength (0.15405 nm), and q and b are the diffraction angle and full-width at half-maximum of an observed peak, respectively.…”
Section: Crystallization Behavior and Morphologymentioning
confidence: 99%
“…Two strong peaks are located at 26.80 eV (Ta 2 O 5 ) and 28.60 eV (Ta 4𝑓 5/2 ) [14]. The 1.8 eV difference between both is very close to the spin-orbit of Ta 4𝑓 (1.9 eV), indicating the formation of Ta 2 O 5[15,16] and TaON[17] again. From the above results, it can be suggested that the LaTaON dielectric film has been formed.…”
mentioning
confidence: 99%