2000
DOI: 10.1109/55.843146
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The effect of surface passivation on the microwave characteristics of undoped AlGaN/GaN HEMTs

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Cited by 685 publications
(313 citation statements)
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“…The passivation has been shown to be necessary to reduce the influence of dispersion. 1 In this report capacitance-voltage ͓C͑V͔͒ measurements of metalinsulator-semiconductor-heterostructure ͑MISH͒ capacitors are utilized to characterize the interface between the heterostructure and the passivation layer.…”
Section: Introductionmentioning
confidence: 99%
“…The passivation has been shown to be necessary to reduce the influence of dispersion. 1 In this report capacitance-voltage ͓C͑V͔͒ measurements of metalinsulator-semiconductor-heterostructure ͑MISH͒ capacitors are utilized to characterize the interface between the heterostructure and the passivation layer.…”
Section: Introductionmentioning
confidence: 99%
“…6,7 The surface passivation approach was suggested to increase the microwave output power. 9,10 However, although the current collapse phenomenon seems to be general for different types of GaNAlGaN FETs, as well as for GaAs power FETs, both the concrete mechanism of rf output power suppression and physical locations of the carrier trapping centers responsible for the collapse, are still far from clear.…”
Section: Mechanism Of Radio-frequency Current Collapse In Gan-algan Fmentioning
confidence: 99%
“…This is contrary to the conclusions of past researchers. 9,10 ͑ii͒ The current compression in gate-pulsed mode occurs both at low ͑below the knee voltage͒ and high drain bias ͓Fig. 1͑a͔͒.…”
Section: Mechanism Of Radio-frequency Current Collapse In Gan-algan Fmentioning
confidence: 99%
“…In addition to Si doping during epitaxy, many papers have reported that Si donors could be incorporated during the deposition process of silicon nitride passivation which could increase the density of 2DEG. [15][16][17] Si donors have been proved to be one of the causes of 2DEG variation from theory and experiment due to Gauss's law and charge neutrality principle. 6,16,[18][19][20] Onojima et al 16 speculated that Si atoms at the SiN x /AlGaN interface might act as donors, which partially neutralize negative polarization charges at the AlGaN surface, and lead to a reduction in the AlGaN potential barrier height, thereby increasing 2DEG density.…”
mentioning
confidence: 99%