2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167)
DOI: 10.1109/relphy.2001.922921
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The effects of plasma-induced damage on transistor degradation and the relationship to field programmable gate array performance

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Cited by 8 publications
(6 citation statements)
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“…Pagaduan et al from Xilinx also show that plasma damage degrades NBTI in p-MOSFETs, but n-MOSFETs are not degraded. 98 The threshold voltage degradation is consistent with their observation that the rise time of the CMOS output signal, controlled by the p-MOSFET, is degraded. The fall time, controlled by the n-MOSFET, is unchanged.…”
Section: Nbti Minimizationsupporting
confidence: 83%
“…Pagaduan et al from Xilinx also show that plasma damage degrades NBTI in p-MOSFETs, but n-MOSFETs are not degraded. 98 The threshold voltage degradation is consistent with their observation that the rise time of the CMOS output signal, controlled by the p-MOSFET, is degraded. The fall time, controlled by the n-MOSFET, is unchanged.…”
Section: Nbti Minimizationsupporting
confidence: 83%
“…Water may also drift from the intermetal dioxide or PSG (phosopho-silicate glass) layers to effect NBTI [10]. The hydrogen commonly used in post metal anneals may also act as a catalyst for NBTI [11].…”
Section: Negative Bias Temperature Instability (Nbti)mentioning
confidence: 99%
“…The temperature and bias stress times vary widely, from a few minutes to hundreds of hours ( [1] pp. 365, [7,8,9,11,12,13,14]).…”
Section: Negative Bias Temperature Instability (Nbti)mentioning
confidence: 99%
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“…En los dispositivos MOS también se observa una degradación de las características I DS -V GS [Rangan et al 1999, Pagaduan et al 2001, manifestándose generalmente como un incremento de la tensión umbral (V T ) [Lin et al 1996].…”
Section: Efectosunclassified