The Elasticity Measurements of Aluminium nm-Films

Abstract

The vibrating reed technique applicable to the elasticity measurements for the metallic films of nm thickness deposited onto reed substrates and its application to vacuum‐deposited aluminium films are reported: Young's modulus of the aluminium films EA1,f shows a good agreement with that of bulk aluminium EA1,b for films of thickness d > 100 nm. For smaller d, FA1,f decreases from EA1,b with decreasing d, especially for d < 10 nm. The decrease in EA1,f is tentatively attributed to the increasing, effects of interfaces between crystallites in the films. The results of internal fricition observed for films of about 50 nm thickness are very similar to those for the films of 100 nm reported by Berry, i.e. the strong decrease in the peak temperatures of the so‐called grain‐boundary relaxations is observed.

Elasticity Study of Nanostructured Al and Al-Si(Cu) Films

“…5 was of pronounced one. The features of Q À1 observed for AlSi(Cu) sp films are very similar to those found in Al ve films, 5,6) indicating that GBAP above 200 K found in nanocrystalline Al films is hardly modified by alloying with Si and Cu. 2θ Fig.…”

“…4) For Al ve films with thickness less than 100 nm, it is also found that the internal friction associated with the grain boundary anelastic process (GBAP, hereafter) starts to increase at about 200 K with elevating temperature, and the Young's modulus at 300 K shows a decrease with decreasing film thickness especially for the thickness range below 20 nm. 5,6) The similar elastic response is also found for vacuum-evaporated silver (Ag ve ) films, [7][8][9] where the decrease in the Young's modulus with decreasing film thickness is supposed to be associated with the decreased Young's modulus in grain boundary regions as well as an increase in the volume fraction of grain boundary regions. On the other hand, a recent elasticity study on nanocrystalline gold reports the following: [10][11][12] The Young's modulus below 200 K is comparable with that in polycrystalline bulk gold, indicating that the Young's modulus of grain boundary regions is almost the same to that in bulk gold.…”

“…The detailed measurement procedure was similar to that described in our previous work. 5) We measured f 0 and Q À1 0 before and f 1 and Q…”

“…In the present work, the elastic properties of sputtered films and vacuum-evaporated films of aluminum and aluminum-silicon-copper alloy were studied and discussed together with the data for Al ve films reported. 5,6) 2. Experimental Procedures Figure 1(a) is a schematic drawing of a silicon reedsubstrate which has been cut out from a CZ-Si single crystal and polished into a vibrating reed with a thick end for clamping.…”

“…Calibration was made by a step-meter for d > 13 nm, where good agreement was found. 5) For one part of Al-Si(Cu) sp films, an effect of annealing was studied, where a silicon reedsubstrate with a specimen film was once detached from a holder to avoid contamination with copper, and annealing was made at 600 K for one hour in 5 Â 10 À4 Pa. The elapsed time in the atmosphere for a silicon reed-substrate between taking out from the deposition chamber and setting into the measurement chamber was about 10 minutes, which was minimized to lower oxidation of the specimen surface.…”