The principal interests in this work are energetic-beam control of carbon-film properties and the' roles of doping and surface morphology in field emission. Carbon films with variable sp3-bonding ii-action were deposited on n-type Si substrates by ArF (193 nm) pulsed-laser ablation (PLA) of a pyrolytic graphite target, and by direct metal ion beam deposition (DMIBD) using a primary Cs+ beam to generate the secondary C-deposition beam. The PLA films are undoped while the DMIBD films are doped with Cs. The kinetic energy (KE) of the incident C atoms/ions was controlled and varied over the range horn -25 eV to -175 eV. Earlier studies have shown that C films' sp3-bonding Eraction and diamond-like properties can be maximized by using KE values near 90 eV. The films' surface morphology, sp3-bonding fraction, and Cs-content were determined as a fiction of KE using atomic force microscopy, TEM/EELS, Rutherford backscattering and nuclear reaction measurements, respectively. Field emission (FE) from these very smooth undoped and Cs-containing films is compared with the FE fi-om two types of deliberately nanostructured carbon films, namely hot-filament chemical vapor deposition (HF-CVD) carbon and carbon nanotubes grown by plasma-enhanced CVD. Electron field emission (FE) characteristics were measured using -25-pm, -5-pm and -1 -pm diameter probes that were scanned with -75 nrn resolution in the x-, y-, and z-directions in a vacuum chamber (-5 x 10-7torr base pressure) equipped with a video camera for viewing. The hydrogen-free and very smooth a-D or a-C films (with high or low sp3 content, and with or without --1% Cs doping) produced by PLD and DMIBD are not good field emitters. Conditioning accompanied by arcing was required to obtain emission, so that their subsequent FE is characteristic of the arc-produced damage site. However, deliberate surface texturing can eliminate the need for conditioning, apparently byg eometrical enhancement of the local electric field. But the most promising approach for < producing microscopically flat FE cathodes is to use materials that are highly nanostructured, z either by the deposition process (e.g. HF-CVD carbon) or intrinsically (e.g. carbon nanotubes). g HF-CVD films were found to combine a number of desirable properties for FE displays and m vacuum microelectronics, including the absence of conditioning, low turn-on fields, high emission site density, and apparent stability and durability during limited long-term testing. Preliminary FE measurements revealed that vertically aligned carbon nanotubes are equally promising.