The error analyze of testing the large aperture flat by the Ritchey-Common method

Ji, Bo; Xu, Chen; Li, Bo

doi:10.1117/12.2071403

Cited by 3 publications

(3 citation statements)

References 2 publications

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“…The average surface map is shown in Figure 11. For comparison, another method, the Ritchey-Common testing, was introduced to measure the 1.5m flat mirror [3][4][5]. As shown in Figure 12, the test device consists of an interferometer, the 1.5m flat mirror, and a 1.8m spherical mirror.…”

Section: Measurement Results and Comparisonmentioning

confidence: 99%

“…m The largest aperture of commercial interferometers is about 900mm, which is insufficient to cover the entire surface of a said large flat mirror. To overcome the problem, two methods have been developed, namely sub-aperture stitching interferometry [1,2] and Ritchey-Common test [3][4][5]. However, the accuracy and efficiency of the sub-aperture stitching interferometry are not high when the sub-apertures are far smaller than the test mirror.…”

Section: Introductionmentioning

confidence: 99%

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Pentaprism Measurements of Large Flat Mirrors

Li¹,

Zhang²,

He³

2017

MMC_A

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In view of the difficulty in measuring large flat mirrors, this paper introduces a pentaprism system that measures the angle differences between points on the mirror surface with a scanning pentaprism. Based on the angle differences, many equations were established and the mirror surface was expressed through a least squares calculation. The error analysis reveals that the system accuracy was 11.6nm root-mean-square (rms) over a 1.5m flat mirror. Then, the pentaprism measurement was compared with Ritchey-Common test. The comparison shows that the difference between the two results is 10.2nm rms over a 1.5m flat mirror, which is within the error range of the pentaprism system. Thus, the proposed pentaprism system is applicable to the measurement of large flat mirrors.

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Section: Measurement Results and Comparisonmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Pentaprism Measurements of Large Flat Mirrors

Li¹,

Zhang²,

He³

2017

MMC_A

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“…Whether the Ritchey-Common test or large aperture interferometry is used, a reference optical element with an aperture equal to or larger than the measured ones is required. 11,12 However, large reference optics is hard to manufacture and is very expensive. The basic principle of the subaperture stitching technique is synthesizing a full-aperture phase map from multiple subaperture phase shapes with motion capability and a stitching algorithm.…”

Section: Introductionmentioning

confidence: 99%

Sparse subaperture stitching method for measuring large aperture planar optics

Shen

Tong

et al. 2016

Opt. Eng

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Abstract. Ring polishing is a primary method to polish large aperture planar optics that is widely used in the fabrication of high-power solid-state laser equipment. The relative motion track with the ring polishing is always rotationally symmetrical and the amount of material removal is related to the radius. The height errors are identical when the points are in the same radius, which can largely reduce the coverage area when the subaperture stitching method is used to measure the figure error of the surface. A new sparse lattice for planar optics polished by ring polishing is introduced. The cumulative error is proven small enough for sparse subaperture stitching by the reference of the simulated data. A planar optical element with 200 mm × 200 mm aperture was chosen to test the feasibility of our proposed method. The results indicate that sparse stitching is suitable for measuring a large planar surface polished by ring polishing. The results of two chain lattice are closer to the fully covered lattice than a one chain lattice. However, more measuring time could be saved by the one chain lattice method. So, the usage of different lattices could be adapted for different periods of large aperture planar optical manufacturing. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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