The Evolution of Integrated Interfaces for MEMS Microphones

Malcovati, P.; Basçhirotto, A.

doi:10.3390/mi9070323

Cited by 27 publications

(15 citation statements)

References 36 publications

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“…where M, N, and L values can be chosen to achieve the target high SNR value. The ADC is simpler if it has an order of two with N = 1 [26]. However, in this case, M values should be high, which requires the integrators opamps with high slew-rate and high gain bandwidth.…”

Section: Implementation Of the Adc Circuitmentioning

confidence: 99%

A Chopper Negative-R Delta-Sigma ADC for Audio MEMS Sensors

Nebhen¹,

Ferreira²

2022

Computer Modeling in Engineering &Amp; Sciences

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This paper presents a proposed low-noise and high-sensitivity Internet of Thing (IoT) system based on an M&NEMS microphone. The IoT device consists of an M&NEMS resistive accelerometer associated with an electronic readout circuit, which is a silicon nanowire and a Continuous-Time (CT)ADC. The first integrator of the ADC is based on a positive feedback DC-gain enhancement two-stage amplifier due to its high linearity and low-noise operations. To mitigate both the offset and 1/f noise, a suggested delay-time chopper negative-R stabilization technique is applied around the first integrator. A 65-nm CMOS process implements the CT ADC. The supply voltage of the CMOS circuit is 1.2-V while 0.96-mW is the power consumption and 0.1-mm 2 is the silicon area. The M&NEMS microphone and ADC complete circuit are fabricated and measured. Over a working frequency bandwidth of 20-kHz, the measurement results of the proposed IoT system reach a signal to noise ratio (SNR) of 102.8-dB. Moreover, it has a measured dynamic range (DR) of 108-dB and a measured signal to noise and distortion ratio (SNDR) of 101.3-dB.

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Section: Implementation Of the Adc Circuitmentioning

confidence: 99%

A Chopper Negative-R Delta-Sigma ADC for Audio MEMS Sensors

Nebhen¹,

Ferreira²

2022

Computer Modeling in Engineering &Amp; Sciences

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“…Despite these benefits, only recently efforts towards non-resonant PA gas sensor miniaturization have been reported, e.g., based on thermal emitters [51,69,80], and LEDs [15,44,50] in combination with microphones, or LEDs and QTFs [109]. Among these, sensors based on highly-sensitive MEMS microphones (employed to detect pressure pulses modulated at audio frequencies) are easy to integrate [110], and offer sensitivities down to ∼tens ppm [15,67,80], with overall small power consumption [50], and form factor [44,50]. PA is unique since it is a direct monitor of a sample nonradiative relaxation channels and, hence, complements absorption spectroscopic techniques [9].…”

Section: Path To Miniaturization and Integrationmentioning

confidence: 99%

Towards Integrated Mid-Infrared Gas Sensors

Popa

Udrea

2019

Sensors

222

120

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Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices.

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“…Most commercial MEMS acoustic sensors in IoT applications are capacitive-type devices due to their compatibility with the standard complementary metal–oxide–semiconductor (CMOS) process in terms of form factor, thermal stability, and linear frequency response. The capacitive-type MEMS acoustic sensor [1,2,3,4,5,6,7,8,9,10,11,12,13,14,15,16] is composed of two plates, namely, a rigid back plate fixed on a substrate and a flexible diaphragm that detects an input acoustic signal. The moving plate should respond flexibly to the input sound pressure, and the hard bottom plate must have etch holes to reduce the damping effect.…”

Section: Introductionmentioning

confidence: 99%

Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor

Lee

Kim

et al. 2019

Sensors

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We present a simple, accurate open-circuit sensitivity model based on both analytically calculated lumped and empirically extracted lumped-parameters that enables a capacitive acoustic sensor to be efficiently characterized in the frequency domain at the wafer level. Our mixed model is mainly composed of two key strategies: the approximately linearized electric-field method (ALEM) and the open- and short-calibration method (OSCM). Analytical ALEM can separate the intrinsic capacitance from the capacitance of the acoustic sensor itself, while empirical OSCM, on the basis of one additional test sample excluding the membrane, can extract the capacitance value of the active part from the entire sensor chip. FEM simulation verified the validity of the model within an error range of 2% in the unit cell. Dynamic open-circuit sensitivity is modelled from lumped parameters based on the equivalent electrical circuit, leading to a modelled resonance frequency under a bias condition. Thus, eliminating a complex read-out integrated circuit (ROIC) integration process, this mixed model not only simplifies the characterization process, but also improves the accuracy of the sensitivity because it considers the fringing field effect between the diaphragm and each etching hole in the back plate.

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The Evolution of Integrated Interfaces for MEMS Microphones

Cited by 27 publications

References 36 publications

A Chopper Negative-R Delta-Sigma ADC for Audio MEMS Sensors

A Chopper Negative-R Delta-Sigma ADC for Audio MEMS Sensors

Towards Integrated Mid-Infrared Gas Sensors

Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor

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