The fabrication of aspherical microlenses using focused ion-beam techniques

Langridge, Mark T.; Cox, D. C.; Webb, R.P.; Stolojan, Vlad

doi:10.1016/j.micron.2013.10.013

Cited by 21 publications

(12 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In principle this would create a stepped contour, however due to edgeeffects of the milling process, as well as redistribution of etched material, a larger number of passes creates a smooth contour of the parabolic dish. Further details of the construction and characterization can be found in [17], where an RMS roughness of 4.0 nm was measured by AFM over the range of the concave parabolic surface. Due to the identical manufacturing process similar values are expected in this work.…”

Section: Fabricationmentioning

confidence: 99%

3D mapping of intensity field about the focus of a micrometer–scale parabolic mirror

McDonald¹,

McConnell²,

Cox³

et al. 2015

Opt. Express

View full text Add to dashboard Cite

Abstract:We report on the fabrication and diffraction-limited characterization of parabolic focusing micromirrors. Sub-micron beam waists are measured for mirrors with 10-µm radius aperture and measured fixed focal lengths in the range from 24 µm to 36 µm. Optical characterization of the 3D intensity in the near-field produced when the device is illuminated with collimated light is performed using a modified confocal microscope. Results are compared directly with angular spectrum simulations, yielding strong agreement between experiment and theory, and identifying the competition between diffraction and focusing in the regime probed.

show abstract

Section: Fabricationmentioning

confidence: 99%

3D mapping of intensity field about the focus of a micrometer–scale parabolic mirror

McDonald¹,

McConnell²,

Cox³

et al. 2015

Opt. Express

View full text Add to dashboard Cite

show abstract

“…Focused ion beam (FIB) technique allows precise fabrication of complex shaped silicon nanostructures, which, however, exhibit unacceptably strong light absorption diminishing their optical application potential. This complication can be caused by a variety of factors, including the changes in the silicon crystal structure and, specifically, the formation of a damaged layer (see Rubanov & Munroe, ; Hopman et al ., ; Schilling et al ., ; Langridge et al ., ). We suggest a fabrication and annealing approach that drastically reduces the damaged layer impact and improves the optical behaviour of the silicon metasurface.…”

Section: Introductionmentioning

confidence: 97%

FIB‐fabricated complex‐shaped 3D chiral photonic silicon nanostructures

Rogov

Артемов

Gorkunov

et al. 2017

Journal of Microscopy

View full text Add to dashboard Cite

SummaryTechnologies capable of fabricating complex shaped silicon metasurfaces attract increasing attention. The focused ion beam fabrication technique is considered traditionally as causing thick damaged layers in silicon resulting in a significant rise of the optical absorption loss. We examine the structure of the FIB-fabricated nanostructures on the silicon-on-sapphire (SOS) platform and its optical characteristics before and after thermal oxidation. We show that being thermally oxidised the FIB-patterned silicon subwavelength nanostructure tends to regain its chiral optical features. The impact of the oxidation process on the silicon nanostructure optical behaviour is discussed.

show abstract

“…The development of aspherical manufacturing technology makes aspherical applications in aerial cameras possible. M T Langridge, D C Cox, et al demonstrated a technique for creating bespoke, highly-accurate aspheric or spherical profile silicon microlens moulds, of almost any footprint, using focused ionbeam milling [14]. Cao, Zhaolou, Wang, Keyi, et al proposed a novel method to fabricate aspherical anamorphic lenses at very low costs [15].…”

Section: Introductionmentioning

confidence: 99%

Development of an Aspherical Aerial Camera Optical System

Lin

Jiang

et al. 2019

IEEE Photonics J.

View full text Add to dashboard Cite

The aerial camera lens largely determines the performance of the camera. It is necessary to further optimize the lens to satisfy the requirements of small-scale and lightweight aircraft camera systems. The optical system design is the primary prerequisite. Therefore, considering the image quality and working environment of the aerial camera, an aspherical aerial camera optical system is developed by studying the aerial camera optical system. The work presented in this paper decreases the overall weight of the aerial camera by using an aspherical lens instead of a spherical lens, which reduces the number of lenses and improves the image quality. The athermalization of the optical system ensures that the camera has good temperature adaptability in the temperature range of −60°C∼60°C. The definition of the aspherical surface shape is detected by a ZYGO digital interferometer. The root mean square (RMS) of the system is 0.0403λ(λ = 632 nm), and the peak value (PV) is 0.354λ, which ensures the image quality of the camera. The research results verify that the aspherical lens can be well applied to the camera optical system, improving the image quality of the system and reducing the weight of the camera.

show abstract

The fabrication of aspherical microlenses using focused ion-beam techniques

Cited by 21 publications

References 28 publications

3D mapping of intensity field about the focus of a micrometer–scale parabolic mirror

3D mapping of intensity field about the focus of a micrometer–scale parabolic mirror

FIB‐fabricated complex‐shaped 3D chiral photonic silicon nanostructures

Development of an Aspherical Aerial Camera Optical System

Contact Info

Product

Resources

About