The Fabrication of High Aspect Ratio Nanostructures on Quartz Substrate

Mohamed, Khairudin; Alkaisi, Maan M.

doi:10.5772/56315

Cited by 3 publications

(2 citation statements)

References 12 publications

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“…Recent developments in nano-scale devices take advantage of many complex patterns with high aspect ratio structures in its design 45,[53][54][55][56] . High strength along with high deformability is an essential property for the design and reliability of novel nano devices 57 .…”

Section: Stiffness Of the Printed Polymer Rodsmentioning

confidence: 99%

Challenges and limits of Mechanical Stability in 3D Direct Laser Writing

Sedghamiz

Liu

Wenzel

2021

Preprint

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Direct laser writing is an effective technique for fabrication of complex polymeric 3D polymer networks using ultrashort laser pulses. Practically, it remains a challenge to design and fabricate high performance materials with different functions that possess a combination of high strength, substantial ductility, and tailored functionality, in particular for small feature sizes. To date, it is difficult to obtain a time-resolved microscopic picture of the printing process in operando. To close this gap, we herewith present a molecular dynamics simulation approach to model direct laser writing and investigate the effect of writing condition and aspect ratio on the mechanical properties of the printed polymer network. We show that writing condition provides a possibility to tune the mechanical properties and an optimum writing condition can be applied to fabricate structures with improved mechanical properties. We reveal that beyond the writing parameters, aspect ratio plays an important role to tune the stiffness of the printed structures.

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Section: Stiffness Of the Printed Polymer Rodsmentioning

confidence: 99%

Challenges and limits of Mechanical Stability in 3D Direct Laser Writing

Sedghamiz

Liu

Wenzel

2021

Preprint

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“…However, the fabricating process of micro/nano structures on insulating material is still a challenging due to limited information available for quartz etching. Pseudo Bosch and Cryogenic processes that employed for deep silicon etches are not suitable for quartz [2].…”

Section: Introductionmentioning

confidence: 99%

The Investigation of Microstructures Fabrication on Quartz Substrate Employing Electron Beam Lithography (EBL) and ICP-RIE Process

Shamsuddin¹,

Mohamed²,

Rad

2014

AMR

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The fabrication of micro or nano-structures on quartz substrate has attracted researchers' attention and interests in recent years due to a wide range of potential applications such as NEMS/MEMS, sensors and biomedical engineering. Various types of next generation lithographic methods have been explored since optical lithography physical limitations has hindered the fabrication of high aspects ratio (HAR) structure on quartz substrates. In this research, the top-down fabrication approach was employed to fabricate microstructures on quartz substrate using Electron Beam Lithography (EBL) system, followed by the pattern transfer process using Inductively Coupled Plasma-Reactive Ion Etching (ICP-RIE) technique. The factors that influenced pattern definition include the type of electron beam (e-beam) photoresist, e-beam exposure parameter such as spot size, working distance, write field, step size, e-beam current, dosage as well as the type of developer and its developing time. The optimum conditions were investigated in achieving micro or nano-structures. Field emission scanning electron microscopy (FESEM) with energy-dispersive X-ray (EDX) and atomic force microscope (AFM) were utilized to characterize the structures profiles.

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Challenges and limits of mechanical stability in 3D direct laser writing

2022

View full text Add to dashboard Cite

Direct laser writing is an effective technique for fabrication of complex 3D polymer networks using ultrashort laser pulses. Practically, it remains a challenge to design and fabricate high performance materials with different functions that possess a combination of high strength, substantial ductility, and tailored functionality, in particular for small feature sizes. To date, it is difficult to obtain a time-resolved microscopic picture of the printing process in operando. To close this gap, we herewith present a molecular dynamics simulation approach to model direct laser writing and investigate the effect of writing condition and aspect ratio on the mechanical properties of the printed polymer network. We show that writing conditions provide a possibility to tune the mechanical properties and an optimum writing condition can be applied to fabricate structures with improved mechanical properties. We reveal that beyond the writing parameters, aspect ratio plays an important role to tune the stiffness of the printed structures.

show abstract

The Fabrication of High Aspect Ratio Nanostructures on Quartz Substrate

Cited by 3 publications

References 12 publications

Challenges and limits of Mechanical Stability in 3D Direct Laser Writing

Challenges and limits of Mechanical Stability in 3D Direct Laser Writing

The Investigation of Microstructures Fabrication on Quartz Substrate Employing Electron Beam Lithography (EBL) and ICP-RIE Process

Challenges and limits of mechanical stability in 3D direct laser writing

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