2023
DOI: 10.1007/s11082-023-04541-1
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The fabrication processes and simple micro-cavity size adjustment of fiber Mach-Zehnder interferometer by laser-induced micro-plasma

Abstract: The detailed fabrication processes of ber Mach-Zehnder interferometers (FMZIs) by nanosecond laserinduced micro-plasma and its simple micro-cavity size adjustment are proposed and demonstrated. The fabrication can be divided into 4 processes: (1) heat transfer, (2) micro-plasma formation, (3) microplasma expansion and ablation, (4) cooling down and micro-structure formation. The simple micro-cavity size adjustment is proposed based on the above understanding, instead of the "point processing" of femtosecond la… Show more

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Cited by 2 publications
(1 citation statement)
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“…All the substrates were rinsed in the isobutyl alcohol and distilled water to avoid contamination before DES application. Pretreatment procedure for borosilicate glass substrates before forming structures was presented in more detail in our previous article [45], and consisted of laser-assisted structuring (laser-induced plasma-assisted ablation method, LIPAA [46,47,48]) to create an additional roughness and a layer of ablation products on the acceptor surface. Substrates made of fiberglass plastic and PTFE were also structured before rinsing to create an additional roughness Ra of the order of 7 µm (mechanically with 320 P sandpaper) in order to increase the further adhesion of the Cu layers.…”
Section: Methodsmentioning
confidence: 99%
“…All the substrates were rinsed in the isobutyl alcohol and distilled water to avoid contamination before DES application. Pretreatment procedure for borosilicate glass substrates before forming structures was presented in more detail in our previous article [45], and consisted of laser-assisted structuring (laser-induced plasma-assisted ablation method, LIPAA [46,47,48]) to create an additional roughness and a layer of ablation products on the acceptor surface. Substrates made of fiberglass plastic and PTFE were also structured before rinsing to create an additional roughness Ra of the order of 7 µm (mechanically with 320 P sandpaper) in order to increase the further adhesion of the Cu layers.…”
Section: Methodsmentioning
confidence: 99%