The First 3D-Printed and Wet-Metallized Three-Axis Accelerometer With Differential Capacitive Sensing

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

“…Several researchers are exploring new technologies and emerging methods to fabricate accelerometers that will offer an alternative paradigm for the manufacturing of these widely used sensors. Some of these recently developed sensors have shown great performance and are very promising. ,− 3D-printing technology is rapid, inexpensive, process-effective, and offers flexibility and customizability. In recent years, 3D printing has emerged as an innovative, highly customizable, and cheap fabrication procedure for various sensors, including accelerometers and inertial motion sensors .…”

“…Due to the large surface area, the capacitive transduction of the signal is realized. The sensor has feature dimensions as low as 450 μm with high capacitive sensitivity of >200 fF/g …”

“…(f) Sensor time response in three axes under the application of a constant acceleration of 0.2 g . Panels e and f: Reproduced with permission from ref . Copyright 2019 IEEE.…”

“…Theoretical results obtained from electromechanical modeling corroborate with the initial experimental results, validating the concept of the sensor and opening the doors to functional 3D-printed MEMS inertial sensors in the future where customization is more desirable than miniaturization and size. A newer and more complex version of the sensor seen in Figure e was developed by the same group in order to address some of its limitations and improve its overall performance. , The new 3D symmetric mechanical structure enables differential sensing in all three directions, something that is not easily achieved via conventional fabrication techniques. Unlike the previous sensor, a proof mass is suspended via folded springs supported by six external frames of a cubic architecture, allowing for the movement of the proof mass in x -, y -, and z -directions.…”

“…The sensor has feature dimensions as low as 450 μm with high capacitive sensitivity of >200 fF/g. 74 A capacitive-based acceleration sensor developed by Zhang et al 10 employs the two parallel plate electrodes concept, is highly flexible, and was fabricated by direct-printing of silver nanoinks on prepatterned flexible paper substrates. The performance of the accelerometer was verified by monitoring human pulse at the neck and inner elbow areas.…”