The First Three-Dimensional Printed and Wet-Metallized Coriolis Mass Flowmeter

Pagani, Leonardo Gaffuri; Carulli, Paola; Zega, Valentina; Suriano, Raffaella; Bernasconi, Roberto; Frangi, Attilio; Levi, Marinella; Magagnin, Luca; Langfelder, Giacomo

doi:10.1109/lsens.2020.2995570

Cited by 11 publications

(9 citation statements)

References 22 publications

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“…Coriolis flow sensors [11], [12], [13], [14], [15], [16], [17], [18], [19], [20], [21], on the other hand, directly measure mass flow by sensing the Coriolis force produced by a flowing mass in a vibrating channel. This force is independent of fluid properties, and so, the same sensor can be used to accurately (<±0.5%) measure the mass flow rate of both liquids and gases.…”

Section: Green Open Access Added To Tu Delft Institutional Repositorymentioning

confidence: 99%

A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing

Oliveira

Pan

Wiegerink

et al. 2022

IEEE J. Solid-State Circuits

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This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-digital converter (DC) that can be used with both liquids and gases. It consists of a micromachined Coriolis mass flow sensor and a CMOS interface circuit that drives it into oscillation and digitizes the resulting mass flow information. A phase-locked loop (PLL) drives the sensor at its resonance frequency ( f D ), while a low 1/ f noise switched-capacitor (SC) proportional-integral (PI) controller maintains a constant drive amplitude. Mass flow through the sensor causes Coriolis-force-induced displacements, which are detected by co-integrated sense capacitors. In-phase (I) and quadrature (Q) components of these displacements are then digitized by two continuous-time delta-sigma modulators (CT-Ms) with finite impulse response (FIR)-DACs and passive mixers. Their outputs are used to accurately estimate and cancel sense path delay, thus improving sensor stability. To ensure constant sensitivity over a wide range of fluid densities, a background sensitivity tuning (BST) scheme adjusts the sense capacitors' bias voltage as a function of f D , which is a good proxy for fluid density. Implemented in a standard 0.18-μm CMOS technology, the interface circuit consumes 13 mW from a 1.8-V supply. The proposed MEMS Coriolis DC achieves a state-of-the-art noise floor of 80 μg/h/ √ Hz and a zero stability (ZS) of ±0.31 mg/h, which is at par with MEMS thermal flow sensors.

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Section: Green Open Access Added To Tu Delft Institutional Repositorymentioning

confidence: 99%

A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing

Oliveira

Pan

Wiegerink

et al. 2022

IEEE J. Solid-State Circuits

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“…Pressure dependency of the cross-sectional shape affects the stiffness of the tube structure, which results in measurement errors when used in resonant sensors such as a Coriolis mass flow sensor or a density sensor [14]. To reduce fabrication costs and increase the tube diameter, devices were developed based on polymer photolithography [15] and 3D printing [16]. However, these technologies resulted in a rectangular cross-sectional tube shape.…”

Section: Introductionmentioning

confidence: 99%

“…In 2020, the first 3D-printed Coriolis mass flow sensor was proposed by Pagani [16]. This design contained a tube with a rectangular cross-sectional shape with inner dimensions of 1 mm × 2 mm and a wall thickness of 500 µm.…”

Section: Introductionmentioning

confidence: 99%

Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor

Yariesbouei

Sanders

Wiegerink

et al. 2023

Sensors

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This paper presents the modeling, fabrication, and testing of a 3D-printed Coriolis mass flow sensor. The sensor contains a free-standing tube with a circular cross-section printed using the LCD 3D-printing technique. The tube has a total length of 42 mm, an inner diameter of about 900 µm, and a wall thickness of approximately 230 µm. The outer surface of the tube is metalized using a Cu plating process, resulting in a low electrical resistance of 0.5 Ω. The tube is brought into vibration using an AC current in combination with a magnetic field from a permanent magnet. The displacement of the tube is detected using a laser Doppler vibrometer (LDV) that is part of a Polytec MSA-600 microsystem analyzer. The Coriolis mass flow sensor has been tested over a flow range of 0–150 g/h for water, 0–38 g/h for isopropyl alcohol (IPA), and 0–50 g/h for nitrogen. The maximum flow rates of water and IPA resulted in less than a 30 mbar pressure drop. The pressure drop at the maximum flow rate of nitrogen is 250 mbar.

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“…The first one is called “whole-body metallization”. With adequate pretreatment, the 3D-printed polymer structure could be entirely plated with a layer of metal. − Researchers have successfully developed metamaterial structures, , 3D magnetically microdevices, , sensors, , and communication devices . The other strategy is named “selective metallization”.…”

Section: Introductionmentioning

confidence: 99%

Selectively Metalizable Low-Temperature Cofired Ceramic for Three-Dimensional Electronics via Hybrid Additive Manufacturing

Wang

et al. 2022

ACS Appl. Mater. Interfaces

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With increasing interest in the rapid development of customized ceramic electronics, hybrid additive manufacturing (HAM) technology has become a competent alternative to traditional solutions such as printed circuit boards and cofired ceramic technology. Herein, the novel HAM technology is proposed by combining a dispensing three-dimensional (3D) printing process and selectively laser-activated electroless plating for fabricating 3D fully functional ceramic electronic products. An appropriative 3D-printable and metalizable low-temperature cofired ceramic slurry is developed to build the green body of ceramic electronics. After the debinding and sintering process, the 3D ceramic structure can be selectively laser-activated and then electrolessly plated to achieve electronic functionality. The thickness of the plated copper layer approaches 10 μm after 4 h of plating, and the electrical conductivity is 5.5 × 107 S m–1, which is close to pure copper (5.8 × 107 S m–1). To reduce the surface roughness of the laser-activated ceramic surface and thereby enhance the conductivity of the copper layer, the laser parameters are optimized as a 1250 mm s–1 scan speed, a 0.4 W laser power, and a 20 kHz laser-spot frequency. A high-power 3D light-emitting diode circuit board with an internal cooling channel is successfully developed to prove the feasibility of this HAM technology for customizing fully functional 3D conformal ceramic electronics.

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The First Three-Dimensional Printed and Wet-Metallized Coriolis Mass Flowmeter

Cited by 11 publications

References 22 publications

A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing

A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing

Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor

Selectively Metalizable Low-Temperature Cofired Ceramic for Three-Dimensional Electronics via Hybrid Additive Manufacturing

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