International Congress on Applications of Lasers &Amp; Electro-Optics 2003
DOI: 10.2351/1.5060114
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The future of lasers in electronics

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Cited by 18 publications
(6 citation statements)
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“…Wafer thickness, width of the saw streets, composition of the wafer and die size, all have to be considered when formulating the saw parameters. Failure to perform the process correctly can cause mechanical damage to the die [8,9]. Wafers are first mounted on a wafer cutting ring and aligned.…”
Section: Mechanical Saw or Blade Dicingmentioning
confidence: 99%
“…Wafer thickness, width of the saw streets, composition of the wafer and die size, all have to be considered when formulating the saw parameters. Failure to perform the process correctly can cause mechanical damage to the die [8,9]. Wafers are first mounted on a wafer cutting ring and aligned.…”
Section: Mechanical Saw or Blade Dicingmentioning
confidence: 99%
“…), limiting the achievable precision and quality. These shortcomings have spurred the development of ultrafast (pi co-and femtosecond) lasers, which deliver enhanced precision and cleanliness of machined features by minimizing collateral damage, plasma effects and thermal diffusion [11][12][13][14]. Femtosecond (fs) pulsed lasers are emerging as tools for microfabrication of all types of materials that are used in biomedical, microelectronics, photonics and MEMS industries.…”
Section: Introductionmentioning
confidence: 99%
“…As a consequence, miniaturization, function integration, and high density interconnection are manufacturing demands in the electronics industry. These demands necessitate thinner rigid and flexible printed circuit board (PCB) substrates to be used in the electronic devices [1,2]. Therefore, the cutting of thin rigid and flexible PCB substrates is critical in the manufacturing of electronic products.…”
Section: Introductionmentioning
confidence: 99%