“…), limiting the achievable precision and quality. These shortcomings have spurred the development of ultrafast (pi co-and femtosecond) lasers, which deliver enhanced precision and cleanliness of machined features by minimizing collateral damage, plasma effects and thermal diffusion [11][12][13][14]. Femtosecond (fs) pulsed lasers are emerging as tools for microfabrication of all types of materials that are used in biomedical, microelectronics, photonics and MEMS industries.…”