The growth and transformation of Pd2Si on (111), (110) and (100) Si

Microstructural evolution of oxides and semiconductor thin films

“…Si and Ge, etc.) [290][291][292][293][294]. There are similarities in a lot of aspects between Pd-Ge and Pd-Si alloy thin films, such as both Ge and Si have the same diamond-like structure; Pd 2 Ge and Pd 2 Si, and PdGe and PdSi compounds also have the same crystal structure.…”

“…To date, however, little effort has been devoted to study Pd-Ge alloy thin films as the technical application of semiconductor Ge is not so extensive than that of semiconductor Si. Wittmer et al [290] and Hutchins et al [291] have investigated the annealing behavior of the transition-metal group elements (e.g. Pd, Pt, Rh and Ni, etc.)…”

“…General trends in microstructural evolution of polycrystalline thin films, as a function of processing conditions and materials class, are discussed in terms of these fundamental kinetic processes. Many factors affect the microstructures of polycrystalline thin films, which can have widely varying grain shapes and distributions of grain sizes and orientations [290][291][292][293][294][304][305][306][307][308][309][310][311]. These structural properties are affected by the conditions under which grain nucleation, growth, and aggregation occur [305].…”

Electron Probe Microanalysis

“…Growth Rate of Pd2Si films. In one study, (166) the diffusioncontrolled growth rate of Pd2Si films was determined with the electron probe. Palladium films -900 A thick were deposited on polished (111) silicon substrates.…”

Insights into microstructural evolution and polycrystalline compounds formation from Pd–Ge thin films

“…However, little effort has been devoted to the study of Pd 2 Ge and PdGe compounds in Pd-Ge thin films due to the limited technical application of Ge compared with those of Si. Wittmer et al [9] and Hutchins and Shepela [10] have investigated the annealing behavior of the transition-metal group, such as Pd, Pt, Rh, and Ni, etc., deposited on single crystal Ge. They found that the formation of Pd 2 Ge compound is similar to that of Pd 2 Si.…”