2006
DOI: 10.1017/s1431927606061265
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The History and Future of the SEM – A Personal View.

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

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“…Use of large solid angle detector arrays The idea of using a large-area segmented backscattered (pixilated) detector has already been proposed and couple of initial experiments performed. [38][39][40][41] The detector array was developed for collecting images in an EBSP system. The advantage of using an array of backscatter detectors in a SEM is obvious: (1) information from each detector could be analyzed offline, (2) different detector elements could be combined to capture the backscattered electrons efficiently with large effective solid angle, (3) some detector elements could be combined in the "high" mode for large angle scattering where atomic contrast dominates, and others in the "low" mode for topological contrast sensitivity and (4) the detectors could be combined to form images synchronized with the scan of the incident electron beam.…”
Section: 1mentioning
confidence: 99%
“…Use of large solid angle detector arrays The idea of using a large-area segmented backscattered (pixilated) detector has already been proposed and couple of initial experiments performed. [38][39][40][41] The detector array was developed for collecting images in an EBSP system. The advantage of using an array of backscatter detectors in a SEM is obvious: (1) information from each detector could be analyzed offline, (2) different detector elements could be combined to capture the backscattered electrons efficiently with large effective solid angle, (3) some detector elements could be combined in the "high" mode for large angle scattering where atomic contrast dominates, and others in the "low" mode for topological contrast sensitivity and (4) the detectors could be combined to form images synchronized with the scan of the incident electron beam.…”
Section: 1mentioning
confidence: 99%