The impact of CMP and underlying back-end topographical features on losses in deposited dielectric waveguides

Barkley, E.; Fonstad, Clifton G.

doi:10.1109/jqe.2004.837329

Cited by 3 publications

(1 citation statement)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…in [33], and in some patents (e.g., US5883914, US5239193 and US5978401). In, for example, [34,35], the design and fabrication of 'heterogeneous' structures, where optoelectronic devices are monolithically integrated with microelectronics, are also demonstrated. However, they require not only advanced VLSI technology and large efforts in terms of resources, but also optical characteristics inevitably need to undergo compromises.…”

Section: A Microfabricated Optical Module For Communication and Sensi...mentioning

confidence: 99%

An optical system for communication and sensing in millimetre-sized swarming microrobots

Corradi

Scholz

Knoll

et al. 2008

J. Micromech. Microeng.

View full text Add to dashboard Cite

Microrobotic technology underlines the concept of top-down fabrication of autonomous or semi-autonomous robotic systems, with the final aim to produce autonomous micromachines. For millimetre-sized robots, all the sub-component modules must be conceived and designed as minimal components able to accomplish a specific basic task, and each of them consequently represents a fundamental part in the whole microrobotic system. Communication and sensing modules, in particular, are indispensable to the microrobot in order to physically interact with its neighbours and the surrounding environment, a fundamental feature for multi-agent or swarm robotic systems. At present, there exist no communication and sensing modules suitable to be integrated in millimetre-sized microrobots that fulfil the requirements of the application discussed in this paper. The objective of the paper is to present the development of an integrated and scalable miniaturized optical system for communication and sensing in swarming microrobots that are among the smallest ever reported. The system consists of optoelectronic devices in a die form, which are assembled on a substrate and encompassed in a mirroring polymeric structure. The final experimental results demonstrate the effectiveness of the optical module, and potential methods for further improving the system performance are finally proposed.

show abstract

Section: A Microfabricated Optical Module For Communication and Sensi...mentioning

confidence: 99%