2020
DOI: 10.1109/jsen.2020.2987061
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The Impact of Gate Recess on the H₂ Detection Properties of Pt-AlGaN/GaN HEMT Sensors

Abstract: The present work reports on the hydrogen gas detection properties of Pt-AlGaN/GaN high electron mobility transistor (HEMT) sensors with recessed gate structure. Devices with gate recess depths from 5 to 15 nm were fabricated using a precision cyclic etching method, examined with AFM, STEM and EDS, and tested towards H 2 response at high temperature. With increasing recess depth, the threshold voltage (V TH ) shifted from −1.57 to 1.49 V. A shallow recess (5 nm) resulted in a 1.03 mA increase in signal variatio… Show more

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Cited by 17 publications
(14 citation statements)
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“…Additionally, the sensitivity was improved at higher temperatures ( Figure 4 d). When the device is biased closed to the threshold voltage, the reduction of the current level leads to a higher sensitivity, which is similar to the gate recess approach [ 31 ]. Since the gate bias modulation is a damage-free technique, it exhibited the advantage over the gate recess method to improve the sensor’s performance.…”
Section: Resultsmentioning
confidence: 99%
“…Additionally, the sensitivity was improved at higher temperatures ( Figure 4 d). When the device is biased closed to the threshold voltage, the reduction of the current level leads to a higher sensitivity, which is similar to the gate recess approach [ 31 ]. Since the gate bias modulation is a damage-free technique, it exhibited the advantage over the gate recess method to improve the sensor’s performance.…”
Section: Resultsmentioning
confidence: 99%
“…The static power consumption is 2.96 mW. The authors of [30] propose the hydrogen gas detection property of Pt-AlGaN/GaN high electron mobility transistor (HEMT) sensors with a recessed gate structure. The power consumption of the sensor is 2.95 mW.…”
Section: Gas Sensorsmentioning
confidence: 99%
“…Feeding ability of the system and both architectures at 22 m from relay antenna compared to minimum required power supply of the gas sensors. The DC powers A1, B1, C1, D1 and E1 correspond to the power supply of sensors given in the references [26][27][28][29][30], respectively.…”
Section: Figure 31mentioning
confidence: 99%
“…The existing sensors in literature though attain very high sensitivities using nanoparticles and patterned gate to increase the sensing area, has poor detection limits [31][32][33][34][35][36][37][38][39]. This limitation arises since the underlying device design and the heart of operation of the sensor (2DEG in case of HEMT) is given little focus compared to the interest laid in improving the sensing area.…”
Section: Comparison With Existing Sensorsmentioning
confidence: 99%