The Influence of a Longitudinal Magnetic Fields on a Non‐Uniform Positive Column

Abstract

The variations of plasma parameters of a dc discharge in a non-uniform magnetized plasma were measured using fast floating double Langmuir probes. A solenoid is used to produce a uniform magnetic field parallel to the discharge axis. The axial changes of the plasma parameters are presented in the range of longitudinal magnetic fields 200 to 600 Gauss at the pressure range 0.3 to 2.1 Torr and discharge currents 5 and 15 mA in argon gas. The experimental results indicate that, as a consequence of the axial magnetic field and the variations in the discharge tube radii, the plasma parameters at small radius exhibit obvious changes in their distributions along the axis compared to the situation of unmagnetized plasma.

Electrical glow discharges and plasma parameter of planar sputtering system for silver target

“…The probe technique is an important one because it can make local measurements. Almost all other techniques, such as spectroscopy or microwave propagation, give information averaged over a large volume of plasma [10].…”