The influence of deposition parameters on the structure and properties of magnetron-sputtered titania coatings

Onifade, Ayokola A.; Kelly, Peter

doi:10.1016/j.tsf.2005.08.180

Cited by 28 publications

(15 citation statements)

References 11 publications

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“…The target was 99.5% purity Ti and the reactive sputtering process was controlled by optical emission monitoring (the 503 nm Ti line was monitored and held at 20% of the full metal signal, as this had previously been shown to produce transparent titania coatings [38,39]). After achieving a base pressure of 1 × 10 −3 Pa, argon was introduced to the chamber at 17.7 SCCM.…”

Section: Methodsmentioning

confidence: 99%

Photocatalytic Activity of Reactively Sputtered Titania Coatings Deposited Using a Full Face Erosion Magnetron

et al. 2013

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Titanium dioxide (titania) is widely used as a photocatalyst for its moderate band gap, high photoactivity, recyclability, nontoxicity, low cost and its significant chemical stability. The anatase phase of titania is known to show the highest photocatalytic activity, however, the presence of this phase alone is not sufficient for sustained activity. In this study TiO 2 coatings were deposited onto glass substrates by mid-frequency pulsed magnetron sputtering from metallic targets in reactive mode using a Full Face Erosion (FFE) magnetron, which allows the magnetic field to be modulated during the deposition process. The as-deposited coatings were analysed by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and micro-Raman spectroscopy. Selected coatings were then annealed at temperatures in the range of 400-700 °C and re-analysed. The photocatalytic activity of the coatings was investigated through measurements of the degradation of organic dyes, such as methyl orange, under the influence of UV and fluorescent light sources. It has been demonstrated that, after annealing, the pulsed magnetron sputtering process produced photo-active surfaces and that the activity of the coatings under exposure to fluorescent lamps was some 35%-45% of that observed under exposure to UV lamps.

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Section: Methodsmentioning

confidence: 99%

Photocatalytic Activity of Reactively Sputtered Titania Coatings Deposited Using a Full Face Erosion Magnetron

et al. 2013

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“…The coatings were deposited at a bias voltage of −40 V. A thin layer of Ti was initially deposited as the adhesion layer prior to the introduction of oxygen to the deposition chamber. The amount of oxygen was controlled using an optical emission monitor, using conditions known to produce stoichiometric TiO 2 [26]. A pulsed-DC power of 2.5 kW was used on the Ti target at frequency 50 kHz and a duty of 97.75% (in synchronous mode).…”

Section: Preparation Of Coated Surfacesmentioning

confidence: 99%

Photocatalytic TiO2 and Doped TiO2 Coatings to Improve the Hygiene of Surfaces Used in Food and Beverage Processing—A Study of the Physical and Chemical Resistance of the Coatings

et al. 2014

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TiO 2 coatings deposited using reactive magnetron sputtering and spray coating methods, as well as Ag-and Mo-doped TiO 2 coatings were investigated as self-cleaning surfaces for beverage processing. The mechanical resistance and retention of the photocatalytic properties of the coatings were investigated over a three-month period in three separate breweries. TiO 2 coatings deposited using reactive magnetron sputtering showed better mechanical durability than the spray coated surfaces, whilst the spray-deposited coating showed enhanced retention of photocatalytic properties. The presence of Ag and Mo dopants improved the photocatalytic properties of TiO 2 as well as the retention of these properties. The spray-coated TiO 2 was the only coating which showed light-induced hydrophilicity, which was retained in the coatings surviving the process conditions. OPEN ACCESSCoatings 2014, 4 434

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“…Although TiO 2 films have been prepared by various methods such as CVD, evaporation, ion beam assisted processes and reactive magnetron sputtering [6], the sputtering technique is promising under circumstances where low temperature deposition and conformal coatings are needed. However, it's known that low temperatures in depositions difficult the attainment of crystalline materials.…”

Section: Introductionmentioning

confidence: 99%

The effect of oxygen concentration on the low temperature deposition of TiO2 thin films

Toku

Pessoa

Maciel

et al. 2008

Surface and Coatings Technology

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The influence of deposition parameters on the structure and properties of magnetron-sputtered titania coatings

Cited by 28 publications

References 11 publications

Photocatalytic Activity of Reactively Sputtered Titania Coatings Deposited Using a Full Face Erosion Magnetron

Photocatalytic Activity of Reactively Sputtered Titania Coatings Deposited Using a Full Face Erosion Magnetron

Photocatalytic TiO2 and Doped TiO2 Coatings to Improve the Hygiene of Surfaces Used in Food and Beverage Processing—A Study of the Physical and Chemical Resistance of the Coatings

The effect of oxygen concentration on the low temperature deposition of TiO2 thin films

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