The influence of elastic and ionization cross‐section approximations on the result of Monte Carlo calculations

Abstract

A Monte Carlo program has been developed on the basis of a Mott cross-section and knock-on model. The use of this program for the set of the film-substrate type systems shows that there is some difference between the calculated and experimental x-ray depth distribution. To clear up the reasons for the discrepancies, the Monte Carlo model is investigated by calculating the various physical quantities associated with the electron distribution in homogeneous bulk and film specimens and by comparing them with the known experimental data. The influence of the elastic and ionization cross-section approximation on the electron distribution in target is studied.